Inventor · disambiguated record
Wendell T. Blonigan
Also filed as: BLONIGAN WENDELL · BLONIGAN WENDELL T · BLONIGAN WENDELL THOMAS
62 granted patents·11 pending applications·3,372 citations·filing 1988–2022
99Inventor score
Files withAPPLIED MATERIALS INC44APPLIED KOMATSU TECHNOLOGY INC12KURITA SHINICHI3BLONIGAN WENDELL THOMAS2INTEVAC INC2
Top patents by PatentIndex Score
73 records- 0199US6477980B1Flexibly suspended gas distribution manifold for plasma chamberAPPLIED MATERIALS INC·Filed 2000·Granted Nov 12, 2002·393 cites·18 claims
- 0298US7017269B2Suspended gas distribution plateAPPLIED MATERIALS INC·Filed 2003·Granted Mar 28, 2006·251 cites·15 claims
- 0398US6823589B2Flexibly suspended gas distribution manifold for plasma chamberAPPLIED MATERIALS INC·Filed 2002·Granted Nov 30, 2004·249 cites·16 claims
- 0497US7270713B2Tunable gas distribution plate assemblyAPPLIED MATERIALS INC·Filed 2003·Granted Sep 18, 2007·124 cites·30 claims
- 0596US7083702B2RF current return path for a large area substrate plasma reactorAPPLIED MATERIALS INC·Filed 2003·Granted Aug 1, 2006·60 cites·40 claims
- 0696US6206176B1Substrate transfer shuttle having a magnetic driveAPPLIED KOMATSU TECHNOLOGY INC·Filed 1998·Granted Mar 27, 2001·191 cites·13 claims
- 0796US5815047AFast transition RF impedance matching network for plasma reactor ignitionAPPLIED MATERIALS INC·Filed 1995·Granted Sep 29, 1998·140 cites·29 claims
- 0895US6534007B1Method and apparatus for detecting the endpoint of a chamber cleaningAPPLIED KOMATSU TECHNOLOGY INC·Filed 1997·Granted Mar 18, 2003·98 cites·15 claims
- 0995US6435868B2Multi-function chamber for a substrate processing systemAPPLIED KOMATSU TECHNOLOGY INC·Filed 2000·Granted Aug 20, 2002·79 cites·25 claims
- 1095US5549756AOptical pyrometer for a thin film deposition systemAPPLIED MATERIALS INC·Filed 1994·Granted Aug 27, 1996·102 cites·32 claims
- 1195US4919542AEmissivity correction apparatus and methodPROCESSING TECHNOLOGIES INC AG·Filed 1988·Granted Apr 24, 1990·158 cites·6 claims
- 1294US7759158B2Scalable photovoltaic cell and solar panel manufacturing with improved wiringAPPLIED MATERIALS INC·Filed 2006·Granted Jul 20, 2010·21 cites·21 claims
- 1394US7438175B2Linear vacuum deposition systemAPPLIED MATERIALS INC·Filed 2005·Granted Oct 21, 2008·28 cites·7 claims
- 1494US7207766B2Load lock chamber for large area substrate processing systemAPPLIED MATERIALS INC·Filed 2004·Granted Apr 24, 2007·69 cites·33 claims
- 1594US6213704B1Method and apparatus for substrate transfer and processingAPPLIED KOMATSU TECHNOLOGY INC·Filed 1998·Granted Apr 10, 2001·144 cites·27 claims
- 1693US8444364B2Auto-sequencing multi-directional inline processing apparatusBLONIGAN WENDELL THOMAS·Filed 2010·Granted May 21, 2013·17 cites·19 claims
- 1793US6679671B2Substrate transfer shuttle having a magnetic driveAPPLIED MATERIALS INC·Filed 2002·Granted Jan 20, 2004·51 cites·20 claims
- 1892US8616820B2Double dual slot load lock chamberKURITA SHINICHI·Filed 2007·Granted Dec 31, 2013·15 cites·17 claims
- 1992US6552297B2RF matching network with distributed outputsAPPLIED KOMATSU TECHNOLOGY INC·Filed 2001·Granted Apr 22, 2003·36 cites·38 claims
- 2092US6359250B1RF matching network with distributed outputsAPPLIED KOMATSU TECHNOLOGY INC·Filed 2000·Granted Mar 19, 2002·37 cites·36 claims
- 2192US6086362AMulti-function chamber for a substrate processing systemAPPLIED KOMATSU TECHNOLOGY INC·Filed 1998·Granted Jul 11, 2000·105 cites·49 claims
- 2291US8033772B2Transfer chamber for vacuum processing systemAPPLIED MATERIALS INC·Filed 2006·Granted Oct 11, 2011·15 cites·31 claims
- 2391US6286230B1Method of controlling gas flow in a substrate processing systemAPPLIED KOMATSU TECHNOLOGY INC·Filed 1999·Granted Sep 11, 2001·101 cites·38 claims
- 2491US6193507B1Multi-function chamber for a substrate processing systemAPPLIED KOMATSU TECHNOLOGY INC·Filed 2000·Granted Feb 27, 2001·47 cites·12 claims
- 2590US7296673B2Substrate conveyor systemAPPLIED MATERIALS INC·Filed 2005·Granted Nov 20, 2007·15 cites·32 claims
- 2690US7018517B2Transfer chamber for vacuum processing systemAPPLIED MATERIALS INC·Filed 2003·Granted Mar 28, 2006·39 cites·30 claims
- 2790US6746198B2Substrate transfer shuttleAPPLIED MATERIALS INC·Filed 2001·Granted Jun 8, 2004·42 cites·21 claims
- 2889US6016611AGas flow control in a substrate processing systemAPPLIED KOMATSU TECHNOLOGY INC·Filed 1998·Granted Jan 25, 2000·88 cites·11 claims
- 2989US5782974AMethod of depositing a thin film using an optical pyrometerAPPLIED MATERIALS INC·Filed 1996·Granted Jul 21, 1998·70 cites·30 claims
- 3088US7105463B2Load lock chamber having two dual slot regionsAPPLIED MATERIALS INC·Filed 2001·Granted Sep 12, 2006·39 cites·25 claims
- 3188US6517303B1Substrate transfer shuttleAPPLIED KOMATSU TECHNOLOGY INC·Filed 1998·Granted Feb 11, 2003·79 cites·38 claims
- 3288US6471459B2Substrate transfer shuttle having a magnetic driveAPPLIED KOMATSU TECHNOLOGY INC·Filed 1999·Granted Oct 29, 2002·72 cites·21 claims
- 3387US8062717B2RF current return path for a large area substrate plasma reactorBLONIGAN WENDELL·Filed 2006·Granted Nov 22, 2011·12 cites·20 claims
- 3487US7086638B2Methods and apparatus for sealing an opening of a processing chamberAPPLIED MATERIALS INC·Filed 2004·Granted Aug 8, 2006·34 cites·34 claims
- 3586US8459276B2Broken wafer recovery systemSTEVENS CRAIG LYLE·Filed 2011·Granted Jun 11, 2013·9 cites·20 claims
- 3686US7976635B2Dual substrate loadlock process equipmentAPPLIED MATERIALS INC·Filed 2010·Granted Jul 12, 2011·5 cites·13 claims
- 3786US6949143B1Dual substrate loadlock process equipmentAPPLIED MATERIALS INC·Filed 1999·Granted Sep 27, 2005·57 cites·79 claims
- 3884US7534301B2RF grounding of cathode in process chamberAPPLIED MATERIALS INC·Filed 2004·Granted May 19, 2009·17 cites·35 claims
- 3983US7641247B2End effector assembly for supporting a substrateAPPLIED MATERIALS INC·Filed 2002·Granted Jan 5, 2010·30 cites·30 claims
- 4083US6719851B1Lid assembly for opening a process chamber lid and uses thereforAPPLIED MATERIALS INC·Filed 2000·Granted Apr 13, 2004·29 cites·6 claims
- 4182US9287152B2Auto-sequencing multi-directional inline processing methodORBOTECH LT SOLAR LLC·Filed 2013·Granted Mar 15, 2016·4 cites·18 claims
- 4281US7316966B2Method for transferring substrates in a load lock chamberAPPLIED MATERIALS INC·Filed 2006·Granted Jan 8, 2008·6 cites·15 claims
- 4380US8672603B2Auto-sequencing inline processing apparatusBLONIGAN WENDELL THOMAS·Filed 2010·Granted Mar 18, 2014·4 cites·20 claims
- 4480US6881276B2Detecting the endpoint of a chamber cleaningAPPLIED MATERIALS INC·Filed 2003·Granted Apr 19, 2005·16 cites·24 claims
- 4580US6824343B2Substrate supportAPPLIED MATERIALS INC·Filed 2002·Granted Nov 30, 2004·20 cites·28 claims
- 4679US7651315B2Large area substrate transferring method for aligning with horizontal actuation of lever armAPPLIED MATERIALS INC·Filed 2007·Granted Jan 26, 2010·5 cites·20 claims
- 4779US7375946B2Method and apparatus for dechucking a substrateAPPLIED MATERIALS INC·Filed 2004·Granted May 20, 2008·20 cites·25 claims
- 4877US8617349B2Showerhead assembly for plasma processing chamberLAW KAM S·Filed 2010·Granted Dec 31, 2013·6 cites·29 claims
- 4977US8365682B2Methods and apparatus for supporting substratesAPPLIED MATERIALS INC·Filed 2005·Granted Feb 5, 2013·5 cites·9 claims
- 5077US7129694B2Large substrate test systemAPPLIED MATERIALS INC·Filed 2002·Granted Oct 31, 2006·21 cites·31 claims
Showing the top 50 of 73 patent records by PatentIndex Score.
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