Inventor
RUSSELL NOEL M
US9 patents
Patents
9 patentsUS6864108B1Mar 8, 2005
Measurement of wafer temperature in semiconductor processing chambers
TEXAS INSTRUMENTS INC29 citations92
US7148140B2Dec 12, 2006
Partial plate anneal plate process for deposition of conductive fill material
TEXAS INSTRUMENTS INC27 citations90
US7037837B2May 2, 2006
Method of fabricating robust nucleation/seed layers for subsequent deposition/fill of metallization layers
TEXAS INSTRUMENTS INC13 citations82
US7256121B2Aug 14, 2007
Contact resistance reduction by new barrier stack process
TEXAS INSTRUMENTS INC7 citations71
US6720255B1Apr 13, 2004
Semiconductor device with silicon-carbon-oxygen dielectric having improved metal barrier adhesion and method of forming the device
TEXAS INSTRUMENTS INC7 citations71
US6723636B1Apr 20, 2004
Methods for forming multiple damascene layers
TEXAS INSTRUMENTS INC7 citations70
US6900127B2May 31, 2005
Multilayer integrated circuit copper plateable barriers
TEXAS INSTRUMENTS INC5 citations62
US6291347B1Sep 18, 2001
Method and system for constructing semiconductor devices
TEXAS INSTRUMENTS INC2 citations61
US7674707B2Mar 9, 2010
Manufacturable reliable diffusion-barrier
TEXAS INSTRUMENTS INC2 citations60