Inventor
DAI FEN
CN8 patents
⚠️ This page may combine multiple inventors who share the name “DAI FEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
3 patentsUS6561889B1May 13, 2003
Methods for making reinforced wafer polishing pads and apparatuses implementing the same
LAM RES CORP83 citations96
US6572463B1Jun 3, 2003
Methods for making reinforced wafer polishing pads utilizing direct casting and apparatuses implementing the same
LAM RES CORP56 citations94
US6949020B2Sep 27, 2005
Methods for making reinforced wafer polishing pads and apparatuses implementing the same
LAM RES CORP13 citations82