P

Inventor

LU CHIH WEI

TW140 patents
⚠️ This page may combine multiple inventors who share the name “LU CHIH WEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

41 patents
US9633999B1Apr 25, 2017

Method and structure for semiconductor mid-end-of-line (MEOL) process

TAIWAN SEMICONDUCTOR MFG CO LTD32 citations94
US10937652B1Mar 2, 2021

Method and structure of cut end with self-aligned double patterning

TAIWAN SEMICONDUCTOR MFG CO LTD11 citations86
US11251118B2Feb 15, 2022

Self-aligned via structures with barrier layers

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations84
US10818600B2Oct 27, 2020

Structure and method for a low-k dielectric with pillar-type air-gaps

TAIWAN SEMICONDUCTOR MFG CO LTD6 citations84
US10636963B2Apr 28, 2020

Magnetic tunnel junctions

TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US10355198B2Jul 16, 2019

Memory device and fabrication method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD8 citations84
US10270028B1Apr 23, 2019

Memory device and method for manufacturing the same

TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US10163887B2Dec 25, 2018

Method and structure for semiconductor mid-end-of-line (MEOL) process

TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US9633949B2Apr 25, 2017

Copper etching integration scheme

TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US9373586B2Jun 21, 2016

Copper etching integration scheme

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations84
US12424488B2Sep 23, 2025

Dual etch-stop layer structure

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations75
US12046551B2Jul 23, 2024

Interconnect structure having a barrier layer along the sidewall of self-aligned via structures

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11942364B2Mar 26, 2024

Selective deposition of a protective layer to reduce interconnect structure critical dimensions

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11848207B2Dec 19, 2023

Method and structure of cut end with self-aligned double patterning

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11798910B2Oct 24, 2023

Self-aligned interconnect structure

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11631639B2Apr 18, 2023

Method of fabricating self-aligned via structures

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11521970B2Dec 6, 2022

Semiconductor device and a method for fabricating the same

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11521896B2Dec 6, 2022

Selective deposition of a protective layer to reduce interconnect structure critical dimensions

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11362030B2Jun 14, 2022

Sidewall spacer structure enclosing conductive wire sidewalls to increase reliability

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11302641B2Apr 12, 2022

Self-aligned cavity strucutre

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US11183422B2Nov 23, 2021

Semiconductor structure and method for manufacturing the same

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11171284B2Nov 9, 2021

Memory device

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US11171052B2Nov 9, 2021

Methods of forming interconnect structures with selectively deposited pillars and structures formed thereby

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11158518B2Oct 26, 2021

Methods of etching metals in semiconductor devices

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10985312B2Apr 20, 2021

Methods of fabricating magneto-resistive random-access memory (MRAM) devices with self-aligned top electrode via and structures formed thereby

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10854458B2Dec 1, 2020

Method and structure for semiconductor device having gate spacer protection layer

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10741417B2Aug 11, 2020

Method for forming interconnect structure

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10700264B2Jun 30, 2020

Memory device and fabrication method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US10515945B2Dec 24, 2019

Method and structure for semiconductor mid-end-of-year (MEOL) process

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10461246B2Oct 29, 2019

Memory device and method for manufacturing the same

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US10340181B2Jul 2, 2019

Interconnect structure including air gap

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US10290536B2May 14, 2019

Structure and method for interconnection

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10068770B2Sep 4, 2018

Method and structure for semiconductor device having gate spacer protection layer

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10020259B2Jul 10, 2018

Copper etching integration scheme

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9947646B2Apr 17, 2018

Method and structure for semiconductor mid-end-of-line (MEOL) process

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9721887B2Aug 1, 2017

Method of forming metal interconnection

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US9698100B2Jul 4, 2017

Structure and method for interconnection

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US9893062B2Feb 13, 2018

Semiconductor device and a method for fabricating the same

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US12464954B2Nov 4, 2025

Magneto-resistive random-access memory (MRAM) devices with self-aligned top electrode via

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12368046B2Jul 22, 2025

Method and structure of cut end with self-aligned double patterning

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12354881B2Jul 8, 2025

Methods of etching metals in semiconductor devices

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63

TAIWAN SEMICONDUCTOR MFG

2 patents

MICROBASE TECHNOLOGY CORP

2 patents

UNIMICRON TECHNOLOGY CORP

1 patent

TAIWAN SEMINCONDUCTOR MFG COMPANY LTD

1 patent

LU CHIH WEI

1 patent

WU CHUN-LIANG

1 patent

YU PO-CHIN

1 patent

Showing the top 50 of 140 patents by PatentIndex Score.