Inventor

BEAMAN KEVIN L

US34 patents

⚠️ This page may combine multiple inventors who share the name “BEAMAN KEVIN L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BEAMAN KEVIN L

MICRON TECHNOLOGY INC

Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces

Methods for forming shallow trench isolation

Methods of forming structures over semiconductor substrates, and methods of forming transistors associated with semiconductor substrates

PD-SOI substrate with suppressed floating body effect and method for its fabrication

DRAM cell constructions, and methods of forming DRAM cells

Semiconductor assemblies, methods of forming structures over semiconductor substrates, and methods of forming transistors associated with semiconductor substrates

Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers

Liner for shallow trench isolation

Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces

PD-SOI substrate with suppressed floating body effect and method for its fabrication

Methods of forming DRAM cells

Methods of forming capacitors and methods of forming capacitor dielectric layers

Liner for shallow trench isolation

Methods for forming small-scale capacitor structures

Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers

Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition

Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces

Methods and systems for controlling temperature during microfeature workpiece processing, E.G. CVD deposition

Method of forming a structure over a semiconductor substrate

Methods of forming transistors

Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces

Methods of forming capacitors and methods of forming capacitor dielectric layers

Methods for forming small-scale capacitor structures

Methods of forming programmable memory devices

Sputtered insulating layer for wordline stacks

Methods of forming FLASH field effect transistor gates and non-FLASH field effect transistor gates

Sputtered insulating layer for wordline stacks

DRAM cell constructions

DRAM cell constructions

Methods of forming isolation structures, and methods of forming nonvolatile memory

Sputtered insulating layer for wordline stacks

ROUND ROCK RES LLC

Method of forming a structure over a semiconductor substrate

Method of forming a structure over a semiconductor substrate

BEAMAN KEVIN L

Methods and systems for controlling temperature during microfeature workpiece processing, E.G., CVD deposition