Inventor
TAM ALEXANDER
US17 patents
⚠️ This page may combine multiple inventors who share the name “TAM ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS8361892B2Jan 29, 2013
Multiple precursor showerhead with by-pass ports
APPLIED MATERIALS INC125 citations98
US7976631B2Jul 12, 2011
Multi-gas straight channel showerhead
APPLIED MATERIALS INC247 citations97
US10062587B2Aug 28, 2018
Pedestal with multi-zone temperature control and multiple purge capabilities
APPLIED MATERIALS INC96 citations96
US9267739B2Feb 23, 2016
Pedestal with multi-zone temperature control and multiple purge capabilities
APPLIED MATERIALS INC52 citations96
US8679956B2Mar 25, 2014
Multiple precursor showerhead with by-pass ports
APPLIED MATERIALS INC23 citations92
US7674352B2Mar 9, 2010
System and method for depositing a gaseous mixture onto a substrate surface using a showerhead apparatus
APPLIED MATERIALS INC25 citations90
US6582522B2Jun 24, 2003
Emissivity-change-free pumping plate kit in a single wafer chamber
APPLIED MATERIALS INC37 citations89
US9644267B2May 9, 2017
Multi-gas straight channel showerhead
APPLIED MATERIALS INC6 citations82
US10811232B2Oct 20, 2020
Multi-plate faceplate for a processing chamber
APPLIED MATERIALS INC13 citations80
USD642605SAug 2, 2011
Lid assembly for a substrate processing chamber
APPLIED MATERIALS INC6 citations74
US11302520B2Apr 12, 2022
Chamber apparatus for chemical etching of dielectric materials
APPLIED MATERIALS INC1 citations61