USD642605SActiveUtility

Lid assembly for a substrate processing chamber

47
Assignee: APPLIED MATERIALS INCPriority: Apr 2, 2010Filed: Apr 2, 2010Granted: Aug 2, 2011
Est. expiryApr 2, 2030(~3.7 yrs left)· nominal 20-yr term from priority
Inventors:Tetsuya IshikawaAlexander TamDavid H. Quach
47
PatentIndex Score
6
Cited by
21
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for a lid assembly for a substrate processing chamber, as shown and described.

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