Inventor · disambiguated record
Alexander Tam
Also filed as: TAM ALEXANDER
17 granted patents·19 pending applications·680 citations·filing 1983–2019
95Inventor score
Top patents by PatentIndex Score
36 records- 0198US8361892B2Multiple precursor showerhead with by-pass portsAPPLIED MATERIALS INC·Filed 2010·Granted Jan 29, 2013·125 cites·20 claims
- 0297US10062587B2Pedestal with multi-zone temperature control and multiple purge capabilitiesAPPLIED MATERIALS INC·Filed 2016·Granted Aug 28, 2018·96 cites·18 claims
- 0397US8679956B2Multiple precursor showerhead with by-pass portsAPPLIED MATERIALS INC·Filed 2013·Granted Mar 25, 2014·23 cites·16 claims
- 0497US7976631B2Multi-gas straight channel showerheadAPPLIED MATERIALS INC·Filed 2007·Granted Jul 12, 2011·247 cites·25 claims
- 0596US9267739B2Pedestal with multi-zone temperature control and multiple purge capabilitiesAPPLIED MATERIALS INC·Filed 2012·Granted Feb 23, 2016·52 cites·14 claims
- 0693US7674352B2System and method for depositing a gaseous mixture onto a substrate surface using a showerhead apparatusAPPLIED MATERIALS INC·Filed 2006·Granted Mar 9, 2010·25 cites·5 claims
- 0791US10811232B2Multi-plate faceplate for a processing chamberAPPLIED MATERIALS INC·Filed 2017·Granted Oct 20, 2020·13 cites·15 claims
- 0889US10130958B2Showerhead assembly with gas injection distribution devicesTAM ALEXANDER·Filed 2010·Granted Nov 20, 2018·9 cites·15 claims
- 0988US6582522B2Emissivity-change-free pumping plate kit in a single wafer chamberAPPLIED MATERIALS INC·Filed 2001·Granted Jun 24, 2003·37 cites·13 claims
- 1087US8481118B2Multi-gas straight channel showerheadBURROWS BRIAN H·Filed 2011·Granted Jul 9, 2013·14 cites·9 claims
- 1183US9644267B2Multi-gas straight channel showerheadAPPLIED MATERIALS INC·Filed 2013·Granted May 9, 2017·6 cites·20 claims
- 1268US8910644B2Method and apparatus for inducing turbulent flow of a processing chamber cleaning gasCHUNG HUA·Filed 2011·Granted Dec 16, 2014·2 cites·14 claims
- 1364US11302520B2Chamber apparatus for chemical etching of dielectric materialsAPPLIED MATERIALS INC·Filed 2015·Granted Apr 12, 2022·1 cites·9 claims
- 1464USD664170SCleaning plate for inducing turbulent flow of a processing chamber cleaning glassCHUNG HUA·Filed 2011·Granted Jul 24, 2012·14 cites·1 claims
- 1556US2006102076A1Apparatus and method for the deposition of silicon nitride filmsAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 1655US9892941B2Multi-zone resistive heaterCUI ANQING·Filed 2009·Granted Feb 13, 2018·1 cites·20 claims
- 1752US2009095221A1Multi-gas concentric injection showerheadTAM ALEXANDER·Filed 2007·Application pending·0 cites
- 1852US2009095222A1Multi-gas spiral channel showerheadTAM ALEXANDER·Filed 2007·Application pending·0 cites
- 1952US2010215854A1Hvpe showerhead designBURROWS BRIAN H·Filed 2010·Application pending·0 cites
- 2051US4585223AEnvelope feederTAM ALEXANDER·Filed 1983·Granted Apr 29, 1986·9 cites·6 claims
- 2151US2011256692A1Multiple precursor concentric delivery showerheadAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 2251US2011253044A1Showerhead assembly with metrology port purgeAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 2348US2005109276A1Thermal chemical vapor deposition of silicon nitride using BTBAS bis(tertiary-butylamino silane) in a single wafer chamberAPPLIED MATERIALS INC·Filed 2004·Application pending·0 cites
- 2448US2007082507A1Method and apparatus for the low temperature deposition of doped silicon nitride filmsAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 2548US2006281310A1Rotating substrate support and methods of useAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 2647USD642605SLid assembly for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2010·Granted Aug 2, 2011·6 cites·1 claims
- 2747US2008314311A1Hvpe showerhead designBURROWS BRIAN H·Filed 2007·Application pending·0 cites
- 2845US2009194024A1Cvd apparatusAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 2944US2012291709A1Rotating substrate support and methods of useSMITH JACOB·Filed 2012·Application pending·0 cites
- 3043US2019304756A1Semiconductor chamber coatings and processesAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 3142US2009194026A1Processing system for fabricating compound nitride semiconductor devicesBURROWS BRIAN H·Filed 2008·Application pending·0 cites
- 3241US2007125762A1Multi-zone resistive heaterAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 3340US2010224130A1Rotating substrate support and methods of useSMITH JACOB·Filed 2010·Application pending·0 cites
- 3440US2007084408A1Batch processing chamber with diffuser plate and injector assemblyAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 3538US2007084406A1Reaction chamber with opposing pockets for gas injection and exhaustYUDOVSKY JOSEPH·Filed 2005·Application pending·0 cites
- 3636US2011121503A1Cvd apparatusAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →