Inventor
SHINOZAKI HIROYUKI
JP93 patents
⚠️ This page may combine multiple inventors who share the name “SHINOZAKI HIROYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
46 patentsUS6464825B1Oct 15, 2002
Substrate processing apparatus including a magnetically levitated and rotated substrate holder
EBARA CORP330 citations99
US5728223AMar 17, 1998
Reactant gas ejector head and thin-film vapor deposition apparatus
EBARA CORP674 citations99
US6176929B1Jan 23, 2001
Thin-film deposition apparatus
EBARA CORP340 citations98
US5950925ASep 14, 1999
Reactant gas ejector head
EBARA CORP697 citations98
US5641054AJun 24, 1997
Magnetic levitation conveyor apparatus
EBARA CORP182 citations98
US5935337AAug 10, 1999
Thin-film vapor deposition apparatus
EBARA CORP90 citations97
USD743456SNov 17, 2015
Dresser disk
EBARA CORP28 citations94
US5397212AMar 14, 1995
Robot with dust-free and maintenance-free actuators
EBARA CORP88 citations94
USD753736SApr 12, 2016
Dresser disk
EBARA CORP18 citations93
US7232286B2Jun 19, 2007
Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber
EBARA CORP17 citations93
US6657345B2Dec 2, 2003
Magnetic bearing controller
EBARA CORP18 citations93
US6515387B1Feb 4, 2003
Controlled magnetic bearing device
EBARA CORP22 citations93
US6373159B1Apr 16, 2002
Substrate rotating apparatus
EBARA CORP27 citations93
US6346757B1Feb 12, 2002
Magnetic bearing controller
EBARA CORP16 citations93
US6464472B1Oct 15, 2002
Circulation fan apparatus and circulation-fan driving motor
EBARA CORP25 citations92
US6269548B1Aug 7, 2001
Spin processing apparatus
EBARA CORP22 citations92
US6022413AFeb 8, 2000
Thin-film vapor deposition apparatus
EBARA CORP40 citations92
US5950646ASep 14, 1999
Vapor feed supply system
EBARA CORP23 citations92
USD954567SJun 14, 2022
Measurement jig
EBARA CORP9 citations86
US10486285B2Nov 26, 2019
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
EBARA CORP9 citations84
US10016871B2Jul 10, 2018
Polishing apparatus and controlling the same
EBARA CORP8 citations84
US9943943B2Apr 17, 2018
Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatus
EBARA CORP7 citations84
US9849557B2Dec 26, 2017
Coupling mechanism, substrate polishing apparatus, method of determining position of rotational center of coupling mechanism, program of determining position of rotational center of coupling mechanism, method of determining maximum pressing load of rotating body, and program of determining maximum pressing load of rotating body
EBARA CORP7 citations84
US9808908B2Nov 7, 2017
Method of monitoring a dressing process and polishing apparatus
EBARA CORP6 citations84
US9757838B2Sep 12, 2017
Polishing apparatus having end point detecting apparatus detecting polishing end point on basis of current and sliding friction
EBARA CORP7 citations84
US9539699B2Jan 10, 2017
Polishing method
EBARA CORP16 citations84
USD764124SAug 16, 2016
Brush for cleaning semiconductor polishing disk
EBARA CORP7 citations84
USD760455SJun 28, 2016
Brush for cleaning semiconductor polishing disk
EBARA CORP8 citations84
US9358662B2Jun 7, 2016
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
EBARA CORP9 citations84
USD743455SNov 17, 2015
Dresser disk
EBARA CORP8 citations84
US9132525B2Sep 15, 2015
Polishing apparatus for flattening surface of workpiece
EBARA CORP7 citations84
USD737873SSep 1, 2015
Dresser disk
EBARA CORP9 citations84
USD722331SFeb 10, 2015
Dressing pellet for dresser disk
EBARA CORP6 citations84
US7025005B2Apr 11, 2006
Stage device and angle detecting device
EBARA CORP17 citations84
US6539043B1Mar 25, 2003
Discharge-pumped excimer laser device
EBARA CORP18 citations84
US6326712B1Dec 4, 2001
Magnetic bearing device
EBARA CORP17 citations84
US9362129B2Jun 7, 2016
Polishing apparatus and polishing method
EBARA CORP7 citations83
US6519273B2Feb 11, 2003
Magnetic bearing and circulation fan apparatus
EBARA CORP13 citations83
US11583973B2Feb 21, 2023
Polishing apparatus
EBARA CORP4 citations75
US7134668B2Nov 14, 2006
Differential pumping seal apparatus
EBARA CORP9 citations74
US6809449B2Oct 26, 2004
Controlled magnetic bearing apparatus
EBARA CORP12 citations74
US6570285B2May 27, 2003
Magnetic bearing apparatus having a protective non-magnetic can
EBARA CORP9 citations74
US6440320B1Aug 27, 2002
Substrate processing method and apparatus
EBARA CORP12 citations74
US6366039B1Apr 2, 2002
Excimer laser device
EBARA CORP12 citations74
US6321463B1Nov 27, 2001
Substrate treating apparatus and method of operating the same
EBARA CORP10 citations74
USD1035468SJul 16, 2024
Measurement jig
EBARA CORP1 citations73
SHINOZAKI HIROYUKI
2 patentsMIYAZAKI MITSURU
1 patentHITACHI LTD
1 patentShowing the top 50 of 93 patents by PatentIndex Score.