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Brush for cleaning semiconductor polishing disk

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Assignee: EBARA CORPPriority: Aug 7, 2012Filed: Feb 7, 2013Granted: Aug 16, 2016
Est. expiryAug 7, 2032(~6.1 yrs left)· nominal 20-yr term from priority
Inventors:Hiroyuki Shinozaki
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PatentIndex Score
7
Cited by
26
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a brush for cleaning semiconductor polishing disk, as shown and described.

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