Inventor
CHEN ROBERT C
US10 patents
⚠️ This page may combine multiple inventors who share the name “CHEN ROBERT C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED MICRO DEVICES INC
9 patentsUS6522013B1Feb 18, 2003
Punch-through via with conformal barrier liner
ADVANCED MICRO DEVICES INC44 citations92
US6159851ADec 12, 2000
Borderless vias with CVD barrier layer
ADVANCED MICRO DEVICES INC42 citations92
US6060384AMay 9, 2000
Borderless vias with HSQ gap filled patterned metal layers
ADVANCED MICRO DEVICES INC30 citations92
US5969425AOct 19, 1999
Borderless vias with CVD barrier layer
ADVANCED MICRO DEVICES INC21 citations92
US5866945AFeb 2, 1999
Borderless vias with HSQ gap filled patterned metal layers
ADVANCED MICRO DEVICES INC35 citations92
US6194328B1Feb 27, 2001
H2 diffusion barrier formation by nitrogen incorporation in oxide layer
ADVANCED MICRO DEVICES INC14 citations74
US6043147AMar 28, 2000
Method of prevention of degradation of low dielectric constant gap-fill material
ADVANCED MICRO DEVICES INC11 citations74
US5973387AOct 26, 1999
Tapered isolated metal profile to reduce dielectric layer cracking
ADVANCED MICRO DEVICES INC7 citations73
US6472751B1Oct 29, 2002
H2 diffusion barrier formation by nitrogen incorporation in oxide layer
ADVANCED MICRO DEVICES INC0 citations52