Inventor
OOTAGAKI TAKASHI
JP10 patents
Patents
10 patentsUS9811096B2Nov 7, 2017
Liquid feeding device and substrate treating device
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US10281210B2May 7, 2019
Substrate processing apparatus and substrate processing method
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US9607865B2Mar 28, 2017
Substrate processing device and substrate processing method
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US9553003B2Jan 24, 2017
Substrate processing device and substrate processing method
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US9795999B2Oct 24, 2017
Substrate processing apparatus and substrate processing method
SHIBAURA MECHATRONICS CORP2 citations70
US10607863B2Mar 31, 2020
Substrate processing apparatus
SHIBAURA MECHATRONICS CORP1 citations61
US10325787B2Jun 18, 2019
Substrate processing apparatus and substrate processing method
SHIBAURA MECHATRONICS CORP1 citations60
US9972513B2May 15, 2018
Device and method for treating a substrate with hydrofluoric and nitric acid
SHIBAURA MECHATRONICS CORP1 citations51
US9694371B2Jul 4, 2017
Substrate treatment apparatus and substrate treatment method
SHIBAURA MECHATRONICS CORP1 citations50
US10276406B2Apr 30, 2019
Substrate processing device and substrate processing method
SHIBAURA MECHATRONICS CORP0 citations41