Inventor
LANIO STEFAN
DE41 patents
⚠️ This page may combine multiple inventors who share the name “LANIO STEFAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEGRATED CIRCUIT TESTING
10 patentsUS7335894B2Feb 26, 2008
High current density particle beam system
INTEGRATED CIRCUIT TESTING40 citations91
US5422486AJun 6, 1995
Scanning electron beam device
INTEGRATED CIRCUIT TESTING47 citations88
US7507956B2Mar 24, 2009
Charged particle beam energy width reduction system for charged particle beam system
INTEGRATED CIRCUIT TESTING9 citations84
US7439500B2Oct 21, 2008
Analyzing system and charged particle beam device
INTEGRATED CIRCUIT TESTING12 citations84
US7576917B2Aug 18, 2009
Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens
INTEGRATED CIRCUIT TESTING7 citations74
US7679054B2Mar 16, 2010
Double stage charged particle beam energy width reduction system for charged particle beam system
INTEGRATED CIRCUIT TESTING3 citations63
US8373136B2Feb 12, 2013
Achromatic beam deflector, achromatic beam separator, charged particle device, method of operating an achromatic beam deflector, and method of operating an achromatic beam separator
INTEGRATED CIRCUIT TESTING3 citations62
US7763866B2Jul 27, 2010
Charged particle beam device with aperture
INTEGRATED CIRCUIT TESTING5 citations62
US7468517B2Dec 23, 2008
Single stage charged particle beam energy width reduction system for charged particle beam system
INTEGRATED CIRCUIT TESTING4 citations62
US8963084B2Feb 24, 2015
Contamination reduction electrode for particle detector
INTEGRATED CIRCUIT TESTING0 citations52
ADVANTEST CORP
7 patentsUS6407387B1Jun 18, 2002
Particle beam apparatus
ADVANTEST CORP46 citations92
US6107633AAug 22, 2000
Electron beam lens
ADVANTEST CORP27 citations92
US6104034AAug 15, 2000
Objective lens
ADVANTEST CORP24 citations92
US5895919AApr 20, 1999
Gun lens for generating a particle beam
ADVANTEST CORP19 citations92
US6667478B2Dec 23, 2003
Particle beam apparatus
ADVANTEST CORP17 citations84
US6627890B2Sep 30, 2003
Particle beam apparatus for tilted observation of a specimen
ADVANTEST CORP13 citations84
US6232601B1May 15, 2001
Dynamically compensated objective lens-detection device and method
ADVANTEST CORP18 citations82
ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH
5 patentsUS9666406B1May 30, 2017
Charged particle beam device, system for a charged particle beam device, and method for operating a charged particle beam device
ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH19 citations83
US9666405B1May 30, 2017
System for imaging a signal charged particle beam, method for imaging a signal charged particle beam, and charged particle beam device
ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH13 citations83
US9697983B1Jul 4, 2017
Thermal field emitter tip, electron beam device including a thermal field emitter tip and method for operating an electron beam device
ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH7 citations80
US9472373B1Oct 18, 2016
Beam separator device, charged particle beam device and methods of operating thereof
ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH7 citations80
US9805908B2Oct 31, 2017
Signal charged particle deflection device, signal charged particle detection system, charged particle beam device and method of detection of a signal charged particle beam
ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH1 citations51
LANIO STEFAN
4 patentsUS8723117B2May 13, 2014
Switchable multi perspective detector, optics therefor and method of operating thereof
LANIO STEFAN9 citations80
US9048068B2Jun 2, 2015
Electron beam device with dispersion compensation, and method of operating same
LANIO STEFAN2 citations61
US8481958B2Jul 9, 2013
Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens
LANIO STEFAN1 citations51
US8158954B2Apr 17, 2012
Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens
LANIO STEFAN1 citations51
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH
4 patentsUS10699867B2Jun 30, 2020
Simplified particle emitter and method of operating thereof
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH2 citations73
US11094501B2Aug 17, 2021
Secondary charged particle imaging system
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH3 citations69
US10991544B2Apr 27, 2021
Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimen
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH0 citations56
US10103004B2Oct 16, 2018
System and method for imaging a secondary charged particle beam with adaptive secondary charged particle optics
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH0 citations51
APPLIED MATERIALS ISRAEL LTD
3 patentsUS10168614B1Jan 1, 2019
On-axis illumination and alignment for charge control during charged particle beam inspection
APPLIED MATERIALS ISRAEL LTD1 citations61
US10522327B2Dec 31, 2019
Method of operating a charged particle beam specimen inspection system
APPLIED MATERIALS ISRAEL LTD0 citations44
US10056228B2Aug 21, 2018
Charged particle beam specimen inspection system and method for operation thereof
APPLIED MATERIALS ISRAEL LTD0 citations44