Switchable multi perspective detector, optics therefor and method of operating thereof

Abstract

A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the aperture plate is configured to be biased to one potential surrounding the first inner aperture opening and the at least one outer aperture opening.

The invention claimed is: 
     
       1. A secondary charged particle detection device for detection of a signal beam, comprising:
 a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap; and 
 a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam, wherein the particle optics comprises an aperture plate having
 at least one first aperture opening in the aperture plate, and at least one second aperture opening in the aperture plate, wherein the at least one second aperture opening is at least one second radially outer aperture opening, and wherein the aperture plate is configured to be biased to one potential surrounding the at least one first aperture opening and the at least one second aperture opening. 
 
 
     
     
       2. The detection device according to  claim 1 , wherein the at least one second portion of the signal beam is a second, a third, a fourth and a fifth portion of the signal beam and the particles optics is configured for separating the signal beam in the first to fifth portion. 
     
     
       3. The detection device according to  claim 1 , wherein the at least one second aperture opening is at least four outer aperture openings. 
     
     
       4. The detection device according to  claim 1 , wherein the aperture plate further comprises:
 one or more protrusions configured for shaping the electrical field when the aperture plate is biased. 
 
     
     
       5. The detection device according to  claim 1 , wherein the particle optics further comprises:
 a focusing lens for focusing the signal beam through the first inner aperture opening. 
 
     
     
       6. The detection device according to  claim 1 , wherein the detector arrangement further comprises:
 a voltage supply connected for to the aperture plate and configured for providing a deceleration potential. 
 
     
     
       7. The detection device according to  claim 1 , wherein the particle optics further comprises:
 a first deflection assembly for compensating dislocations of the signal beam introduced by scanning of a primary charged particle beam and for aligning the signal beam. 
 
     
     
       8. The detection device according to  claim 7 , wherein the particle optics further comprises:
 a second deflection assembly for compensating dislocations of the signal beam introduced by scanning of a primary charged particle beam and for aligning the signal beam. 
 
     
     
       9. The detection device according to  claim 1 , wherein the thickness of the aperture plate is 10 μm to 4 mm. 
     
     
       10. The detection device according to  claim 1 , wherein the detection elements are PIN diodes having an active detection area of 1 mm 2  or below. 
     
     
       11. The detection device according to  claim 1 , wherein the detector arrangement is configured to have detection elements providing a 45° angular resolution by providing at least 8 detection elements or by rotating the detection elements by 45°. 
     
     
       12. A charged particle beam device, comprising:
 a charged particle beam source for providing a primary charged particle beam; 
 a first focusing element for focusing the primary charged particle beam on the specimen, wherein a signal beam is generated; and 
 a charged particle detection device for detection of a signal beam comprising: 
 a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap; and 
 a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam, wherein the particle optics comprises an aperture plate having
 at least one first aperture opening in the aperture plate, and at least one second aperture opening in the aperture plate, wherein the at least one second aperture opening is at least one second radially outer aperture opening, and wherein the aperture plate is configured to be biased to one potential surrounding the at least one first aperture opening and the at least one second aperture opening. 
 
 
     
     
       13. The detection device according to  claim 12 , wherein the at least one second aperture opening is at least four outer aperture openings. 
     
     
       14. A charged particle multi-beam device comprising:
 at least two charged particle beam devices, wherein each of the at least two charged particle beam devices comprises:
 a charged particle beam source for providing a primary charged particle beam; 
 a first focusing element for focusing the primary charged particle beam on the specimen, wherein a signal beam is generated; and 
 a charged particle detection device for detection of a signal beam comprising:
 a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap; 
 a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam, wherein the particle optics comprises an aperture plate having
 at least one first aperture opening in the aperture plate, and at least one second aperture opening in the aperture plate, wherein the at least one second aperture opening is at least one second radially outer aperture opening, 
 wherein the aperture plate is configured to be biased to one potential surrounding the at least one first aperture opening and the at least one second aperture opening. 
 
 
 
 
     
     
       15. A method of operating a detection device, the method comprising:
 biasing an aperture plate of a particle optics, wherein the particle optics includes at least one first aperture opening in the aperture plate, and at least one second aperture opening in the aperture plate, wherein the at least one second aperture opening is at least one second radially outer aperture opening, wherein the aperture plate is biased such that one potential is surrounding the at least one first aperture opening and the at least one second aperture opening; 
 detecting a starting angle of a signal beam with a detector assembly having at least one detection element corresponding to the first aperture opening and at least one detection element corresponding to the at least one second aperture opening. 
 
     
     
       16. The method according to  claim 15 , wherein the detecting is conducted with a bandwidth of 1 GHz or above. 
     
     
       17. The method according to  claim 15 , the method further comprising:
 focusing the signal beam.