Inventor
CHO YUN-SEOK
KR16 patents
⚠️ This page may combine multiple inventors who share the name “CHO YUN-SEOK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HYNIX SEMICONDUCTOR INC
11 patentsUS7446049B2Nov 4, 2008
Method for fabricating semiconductor device using amorphous carbon layer as sacrificial hard mask
HYNIX SEMICONDUCTOR INC20 citations92
US6589861B2Jul 8, 2003
Method for fabricating a semiconductor device
HYNIX SEMICONDUCTOR INC19 citations90
US7442648B2Oct 28, 2008
Method for fabricating semiconductor device using tungsten as sacrificial hard mask
HYNIX SEMICONDUCTOR INC9 citations83
US7851842B2Dec 14, 2010
Vertical channel transistor in semiconductor device and method of fabricating the same
HYNIX SEMICONDUCTOR INC7 citations73
US7910443B2Mar 22, 2011
Method involving trimming a hard mask in the peripheral region of a semiconductor device
HYNIX SEMICONDUCTOR INC5 citations62
US7785960B2Aug 31, 2010
Vertical channel transistor in semiconductor device and method of fabricating the same
HYNIX SEMICONDUCTOR INC2 citations62
US7829415B2Nov 9, 2010
Method of fabricating semiconductor device for preventing a pillar pattern from bending and from exposing externally
HYNIX SEMICONDUCTOR INC5 citations61
US8053313B2Nov 8, 2011
Semiconductor device and method of fabricating the same
HYNIX SEMICONDUCTOR INC1 citations51
US7989292B2Aug 2, 2011
Method of fabricating a semiconductor device with a channel formed in a vertical direction
HYNIX SEMICONDUCTOR INC1 citations51
US7906398B2Mar 15, 2011
Method of fabricating semiconductor device
HYNIX SEMICONDUCTOR INC1 citations51
US7851293B2Dec 14, 2010
Method for forming vertical channel transistor of semiconductor device
HYNIX SEMICONDUCTOR INC0 citations51