Inventor
BANTHIA VIKASH
US22 patents
Patents
22 patentsUS7939422B2May 10, 2011
Methods of thin film process
APPLIED MATERIALS INC240 citations98
US7335609B2Feb 26, 2008
Gap-fill depositions introducing hydroxyl-containing precursors in the formation of silicon containing dielectric materials
APPLIED MATERIALS INC70 citations95
US7456116B2Nov 25, 2008
Gap-fill depositions in the formation of silicon containing dielectric materials
APPLIED MATERIALS INC42 citations90
US6843882B2Jan 18, 2005
Gas flow control in a wafer processing system having multiple chambers for performing same process
APPLIED MATERIALS INC47 citations90
US7642171B2Jan 5, 2010
Multi-step anneal of thin films for film densification and improved gap-fill
APPLIED MATERIALS INC15 citations83
US10256144B2Apr 9, 2019
Process integration approach of selective tungsten via fill
APPLIED MATERIALS INC5 citations82
US10704147B2Jul 7, 2020
Process kit design for in-chamber heater and wafer rotating mechanism
APPLIED MATERIALS INC2 citations73
US10727119B2Jul 28, 2020
Process integration approach of selective tungsten via fill
APPLIED MATERIALS INC2 citations72
US10395916B2Aug 27, 2019
In-situ pre-clean for selectivity improvement for selective deposition
APPLIED MATERIALS INC3 citations72
US9947578B2Apr 17, 2018
Methods for forming low-resistance contacts through integrated process flow systems
APPLIED MATERIALS INC2 citations72
US9595466B2Mar 14, 2017
Methods for etching via atomic layer deposition (ALD) cycles
APPLIED MATERIALS INC2 citations72
US11387134B2Jul 12, 2022
Process kit for a substrate support
APPLIED MATERIALS INC2 citations70
US11421322B2Aug 23, 2022
Blocker plate for use in a substrate process chamber
APPLIED MATERIALS INC0 citations62
US11249386B2Feb 15, 2022
Extreme ultraviolet mask with backside coating
APPLIED MATERIALS INC0 citations62
US10508339B2Dec 17, 2019
Blocker plate for use in a substrate process chamber
APPLIED MATERIALS INC1 citations62
US12293902B2May 6, 2025
Process kit for a substrate support
APPLIED MATERIALS INC1 citations61
USD1115719SMar 3, 2026
Lower edge ring of a process kit for semiconductor substrate processing
APPLIED MATERIALS INC0 citations60
USD1115720SMar 3, 2026
Lower edge ring of a process kit for semiconductor substrate processing
APPLIED MATERIALS INC0 citations60
US11355391B2Jun 7, 2022
Method for forming a metal gapfill
APPLIED MATERIALS INC0 citations60
US10535527B2Jan 14, 2020
Methods for depositing semiconductor films
APPLIED MATERIALS INC0 citations52
US10879081B2Dec 29, 2020
Methods of reducing or eliminating defects in tungsten film
APPLIED MATERIALS INC0 citations51
US10256076B2Apr 9, 2019
Substrate processing apparatus and methods
APPLIED MATERIALS INC0 citations39