P

Inventor

LIN XING

US48 patents
⚠️ This page may combine multiple inventors who share the name “LIN XING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM IP HOLDING BV

16 patents
USD1067204SMar 18, 2025

Susceptor

ASM IP HOLDING BV6 citations84
USD1030687SJun 11, 2024

Susceptor

ASM IP HOLDING BV10 citations84
US11764101B2Sep 19, 2023

Susceptor for semiconductor substrate processing

ASM IP HOLDING BV4 citations71
US11053591B2Jul 6, 2021

Multi-port gas injection system and reactor system including same

ASM IP HOLDING BV4 citations69
USD1031676SJun 18, 2024

Combined susceptor, support, and lift system

ASM IP HOLDING BV2 citations68
US12378665B2Aug 5, 2025

High temperature coatings for a preclean and etch apparatus and related methods

ASM IP HOLDING BV1 citations60
US12417933B2Sep 16, 2025

Wafer far edge temperature measurement system with lamp bank alignment

ASM IP HOLDING BV0 citations59
US12006572B2Jun 11, 2024

Reactor system including a gas distribution assembly for use with activated species and method of using same

ASM IP HOLDING BV1 citations58
USD1028913SMay 28, 2024

Semiconductor deposition reactor ring

ASM IP HOLDING BV0 citations58
US12354893B2Jul 8, 2025

Fixture and method for determining position of a target in a reaction chamber

ASM IP HOLDING BV0 citations57
US12394659B2Aug 19, 2025

Susceptors with film deposition control features

ASM IP HOLDING BV0 citations48
US12564001B2Feb 24, 2026

Dual pyrometer systems for substrate temperature control during film deposition

ASM IP HOLDING BV0 citations47
US12272527B2Apr 8, 2025

Apparatus for use with hydrogen radicals and method of using same

ASM IP HOLDING BV0 citations47
US12234554B2Feb 25, 2025

Semiconductor deposition reactor and components for reduced quartz devitrification

ASM IP HOLDING BV0 citations47
US12563998B2Feb 24, 2026

Apparatus and methods for cooling reaction chambers in semiconductor processing systems

ASM IP HOLDING BV0 citations46
US12112938B2Oct 8, 2024

Semiconductor processing preclean methods and apparatus

ASM IP HOLDING BV0 citations41

APPLIED MATERIALS INC

13 patents
US10950477B2Mar 16, 2021

Ceramic heater and esc with enhanced wafer edge performance

APPLIED MATERIALS INC280 citations99
US9725806B2Aug 8, 2017

Multi-zone pedestal for plasma processing

APPLIED MATERIALS INC7 citations84
US8982530B2Mar 17, 2015

Methods and apparatus toward preventing ESC bonding adhesive erosion

APPLIED MATERIALS INC8 citations84
US10403535B2Sep 3, 2019

Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system

APPLIED MATERIALS INC11 citations83
US10692703B2Jun 23, 2020

Ceramic heater with enhanced RF power delivery

APPLIED MATERIALS INC2 citations72
US10879041B2Dec 29, 2020

Method and apparatus of achieving high input impedance without using ferrite materials for RF filter applications in plasma chambers

APPLIED MATERIALS INC4 citations71
US9948214B2Apr 17, 2018

High temperature electrostatic chuck with real-time heat zone regulating capability

APPLIED MATERIALS INC2 citations71
US10090187B2Oct 2, 2018

Multi-zone pedestal for plasma processing

APPLIED MATERIALS INC1 citations63
US10971389B2Apr 6, 2021

Multi-zone pedestal for plasma processing

APPLIED MATERIALS INC0 citations62
US10811301B2Oct 20, 2020

Dual-zone heater for plasma processing

APPLIED MATERIALS INC0 citations52
US10770328B2Sep 8, 2020

Substrate support with symmetrical feed structure

APPLIED MATERIALS INC0 citations52
US10497606B2Dec 3, 2019

Dual-zone heater for plasma processing

APPLIED MATERIALS INC0 citations52
US10096494B2Oct 9, 2018

Substrate support with symmetrical feed structure

APPLIED MATERIALS INC0 citations51

NETAPP INC

4 patents

UNIV CALIFORNIA

3 patents

UNIV TSINGHUA

3 patents

LIN XING

2 patents

EMC CORP

1 patent

DOUGLIS FREDERICK

1 patent

UNIV ZHEJIANG

1 patent

BANNA SAMER

1 patent

NAGARAJAN RAMESH

1 patent

TENCENT TECH SHENZHEN CO LTD

1 patent

WUXI MESH TECH CO LTD

1 patent