Inventor
LIN XING
US48 patents
⚠️ This page may combine multiple inventors who share the name “LIN XING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
16 patentsUSD1067204SMar 18, 2025
Susceptor
ASM IP HOLDING BV6 citations84
USD1030687SJun 11, 2024
Susceptor
ASM IP HOLDING BV10 citations84
US11764101B2Sep 19, 2023
Susceptor for semiconductor substrate processing
ASM IP HOLDING BV4 citations71
US11053591B2Jul 6, 2021
Multi-port gas injection system and reactor system including same
ASM IP HOLDING BV4 citations69
USD1031676SJun 18, 2024
Combined susceptor, support, and lift system
ASM IP HOLDING BV2 citations68
US12378665B2Aug 5, 2025
High temperature coatings for a preclean and etch apparatus and related methods
ASM IP HOLDING BV1 citations60
US12417933B2Sep 16, 2025
Wafer far edge temperature measurement system with lamp bank alignment
ASM IP HOLDING BV0 citations59
US12006572B2Jun 11, 2024
Reactor system including a gas distribution assembly for use with activated species and method of using same
ASM IP HOLDING BV1 citations58
USD1028913SMay 28, 2024
Semiconductor deposition reactor ring
ASM IP HOLDING BV0 citations58
US12354893B2Jul 8, 2025
Fixture and method for determining position of a target in a reaction chamber
ASM IP HOLDING BV0 citations57
US12394659B2Aug 19, 2025
Susceptors with film deposition control features
ASM IP HOLDING BV0 citations48
US12564001B2Feb 24, 2026
Dual pyrometer systems for substrate temperature control during film deposition
ASM IP HOLDING BV0 citations47
US12272527B2Apr 8, 2025
Apparatus for use with hydrogen radicals and method of using same
ASM IP HOLDING BV0 citations47
US12234554B2Feb 25, 2025
Semiconductor deposition reactor and components for reduced quartz devitrification
ASM IP HOLDING BV0 citations47
US12563998B2Feb 24, 2026
Apparatus and methods for cooling reaction chambers in semiconductor processing systems
ASM IP HOLDING BV0 citations46
US12112938B2Oct 8, 2024
Semiconductor processing preclean methods and apparatus
ASM IP HOLDING BV0 citations41
APPLIED MATERIALS INC
13 patentsUS10950477B2Mar 16, 2021
Ceramic heater and esc with enhanced wafer edge performance
APPLIED MATERIALS INC280 citations99
US9725806B2Aug 8, 2017
Multi-zone pedestal for plasma processing
APPLIED MATERIALS INC7 citations84
US8982530B2Mar 17, 2015
Methods and apparatus toward preventing ESC bonding adhesive erosion
APPLIED MATERIALS INC8 citations84
US10403535B2Sep 3, 2019
Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system
APPLIED MATERIALS INC11 citations83
US10692703B2Jun 23, 2020
Ceramic heater with enhanced RF power delivery
APPLIED MATERIALS INC2 citations72
US10879041B2Dec 29, 2020
Method and apparatus of achieving high input impedance without using ferrite materials for RF filter applications in plasma chambers
APPLIED MATERIALS INC4 citations71
US9948214B2Apr 17, 2018
High temperature electrostatic chuck with real-time heat zone regulating capability
APPLIED MATERIALS INC2 citations71
US10090187B2Oct 2, 2018
Multi-zone pedestal for plasma processing
APPLIED MATERIALS INC1 citations63
US10971389B2Apr 6, 2021
Multi-zone pedestal for plasma processing
APPLIED MATERIALS INC0 citations62
US10811301B2Oct 20, 2020
Dual-zone heater for plasma processing
APPLIED MATERIALS INC0 citations52
US10770328B2Sep 8, 2020
Substrate support with symmetrical feed structure
APPLIED MATERIALS INC0 citations52
US10497606B2Dec 3, 2019
Dual-zone heater for plasma processing
APPLIED MATERIALS INC0 citations52
US10096494B2Oct 9, 2018
Substrate support with symmetrical feed structure
APPLIED MATERIALS INC0 citations51
NETAPP INC
4 patentsUS11444997B2Sep 13, 2022
Methods for dictionary-based compression and devices thereof
NETAPP INC0 citations62
US11122095B2Sep 14, 2021
Methods for dictionary-based compression and devices thereof
NETAPP INC0 citations62
US11256424B2Feb 22, 2022
Reducing write tail latency in storage systems
NETAPP INC0 citations52
US10866928B2Dec 15, 2020
Methods for optimized variable-size deduplication using two stage content-defined chunking and devices thereof
NETAPP INC0 citations45
UNIV CALIFORNIA
3 patentsUS11392830B2Jul 19, 2022
Devices and methods employing optical-based machine learning using diffractive deep neural networks
UNIV CALIFORNIA10 citations84
US12086717B2Sep 10, 2024
Devices and methods employing optical-based machine learning using diffractive deep neural networks
UNIV CALIFORNIA0 citations61
US11694082B2Jul 4, 2023
Devices and methods employing optical-based machine learning using diffractive deep neural networks
UNIV CALIFORNIA0 citations61
UNIV TSINGHUA
3 patentsUS11600060B2Mar 7, 2023
Nonlinear all-optical deep-learning system and method with multistage space-frequency domain modulation
UNIV TSINGHUA1 citations62
US12314836B2May 27, 2025
Optical diffractive processing unit
UNIV TSINGHUA0 citations50
US9386296B2Jul 5, 2016
Method and apparatus for coded focal stack photographing
UNIV TSINGHUA1 citations49