Inventor
SORAOKA MINORU
JP25 patents
⚠️ This page may combine multiple inventors who share the name “SORAOKA MINORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
17 patentsUS5855726AJan 5, 1999
Vacuum processing apparatus and semiconductor manufacturing line using the same
HITACHI LTD407 citations99
US6519504B1Feb 11, 2003
Vacuum processing apparatus and semiconductor manufacturing line using the same
HITACHI LTD45 citations96
US4936967AJun 26, 1990
Method of detecting an end point of plasma treatment
HITACHI LTD30 citations92
US4453757AJun 12, 1984
Wafer gripping device
HITACHI LTD30 citations92
US5861601AJan 19, 1999
Microwave plasma processing apparatus and method
HITACHI LTD45 citations88
US6188935B1Feb 13, 2001
Vacuum processing apparatus and semiconductor manufacturing line using the same
HITACHI LTD9 citations82
US7347656B2Mar 25, 2008
Vacuum processing apparatus and semiconductor manufacturing line using the same
HITACHI LTD3 citations74
US6752579B2Jun 22, 2004
Vacuum processing apparatus and semiconductor manufacturing line using the same
HITACHI LTD7 citations74
US6752580B2Jun 22, 2004
Vacuum processing apparatus and semiconductor manufacturing line using the same
HITACHI LTD3 citations74
US6705828B2Mar 16, 2004
Vacuum processing apparatus and semiconductor manufacturing line using the same
HITACHI LTD11 citations74
US6672819B1Jan 6, 2004
Vacuum processing apparatus and semiconductor manufacturing line using the same
HITACHI LTD7 citations74
US6526330B2Feb 25, 2003
Vacuum processing apparatus and semiconductor manufacturing line using the same
HITACHI LTD5 citations74
US6253117B1Jun 26, 2001
Vacuum processing apparatus and semiconductor manufacturing line using the same
HITACHI LTD3 citations74
US6962472B2Nov 8, 2005
Vacuum processing apparatus and semiconductor manufacturing line using the same
HITACHI LTD1 citations63
US6895685B2May 24, 2005
Vacuum processing apparatus and semiconductor manufacturing line using the same
HITACHI LTD1 citations63
US7201551B2Apr 10, 2007
Vacuum processing apparatus and semiconductor manufacturing line using the same
HITACHI LTD0 citations52
US6430469B2Aug 6, 2002
Vacuum processing apparatus and semiconductor manufacturing line using the same
HITACHI LTD0 citations52
HITACHI HIGH TECH CORP
6 patentsUS7828928B2Nov 9, 2010
Vacuum processing apparatus
HITACHI HIGH TECH CORP10 citations92
US7335277B2Feb 26, 2008
Vacuum processing apparatus
HITACHI HIGH TECH CORP24 citations92
US7247207B2Jul 24, 2007
Vacuum processing apparatus
HITACHI HIGH TECH CORP11 citations92
US7833382B2Nov 16, 2010
Vacuum processing apparatus
HITACHI HIGH TECH CORP1 citations62
USD546354SJul 10, 2007
Semiconductor manufacturing apparatus
HITACHI HIGH TECH CORP4 citations57
US7976632B2Jul 12, 2011
Vacuum processing apparatus
HITACHI HIGH TECH CORP0 citations52