P

Inventor

SUZUKI TOSHIYA

JP130 patents
⚠️ This page may combine multiple inventors who share the name “SUZUKI TOSHIYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM IP HOLDING BV

19 patents
US10600637B2Mar 24, 2020

Formation of SiOC thin films

ASM IP HOLDING BV353 citations99
US10510529B2Dec 17, 2019

Formation of SiOCN thin films

ASM IP HOLDING BV287 citations99
US10424476B2Sep 24, 2019

Formation of SiOCN thin films

ASM IP HOLDING BV289 citations99
US10312055B2Jun 4, 2019

Method of depositing film by PEALD using negative bias

ASM IP HOLDING BV416 citations99
US9786491B2Oct 10, 2017

Formation of SiOCN thin films

ASM IP HOLDING BV484 citations99
US9887082B1Feb 6, 2018

Method and apparatus for filling a gap

ASM IP HOLDING BV466 citations98
US9786492B2Oct 10, 2017

Formation of SiOCN thin films

ASM IP HOLDING BV65 citations98
US10580645B2Mar 3, 2020

Plasma enhanced atomic layer deposition (PEALD) of SiN using silicon-hydrohalide precursors

ASM IP HOLDING BV17 citations85
US11107673B2Aug 31, 2021

Formation of SiOCN thin films

ASM IP HOLDING BV5 citations84
US10410857B2Sep 10, 2019

Formation of SiN thin films

ASM IP HOLDING BV13 citations84
US11170993B2Nov 9, 2021

Selective PEALD of oxide on dielectric

ASM IP HOLDING BV8 citations83
US10381219B1Aug 13, 2019

Methods for forming a silicon nitride film

ASM IP HOLDING BV17 citations82
US11728164B2Aug 15, 2023

Selective PEALD of oxide on dielectric

ASM IP HOLDING BV4 citations74
US11784043B2Oct 10, 2023

Formation of SiN thin films

ASM IP HOLDING BV1 citations73
US11735414B2Aug 22, 2023

Method of post-deposition treatment for silicon oxide film

ASM IP HOLDING BV1 citations73
US11562900B2Jan 24, 2023

Formation of SiOC thin films

ASM IP HOLDING BV1 citations73
US11133181B2Sep 28, 2021

Formation of SiN thin films

ASM IP HOLDING BV3 citations73
US11081345B2Aug 3, 2021

Method of post-deposition treatment for silicon oxide film

ASM IP HOLDING BV3 citations73
US10741385B2Aug 11, 2020

Method and apparatus for filling a gap

ASM IP HOLDING BV1 citations73

FUJITSU LTD

5 patents

NIPPON STEEL & SUMITOMO METAL CORP

5 patents

NIPPON STEEL CORP

5 patents

HARISON TOSHIBA LIGHTING CORP

3 patents

TOKYO ELECTRON LTD

2 patents

RENESAS ELECTRONICS CORP

2 patents

SUZUKI TOSHIYA

2 patents

NEC CORP

2 patents

RENESAS TECH CORP

1 patent

RICOH KK

1 patent

TOSHIBA KK

1 patent

FUJI CORP

1 patent

MITSUBISHI CABLE IND LTD

1 patent

Showing the top 50 of 130 patents by PatentIndex Score.