Inventor
BRIGHT NICOLAS J
US29 patents
⚠️ This page may combine multiple inventors who share the name “BRIGHT NICOLAS J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
14 patentsUS5350479ASep 27, 1994
Electrostatic chuck for high power plasma processing
APPLIED MATERIALS INC199 citations98
US5770099AJun 23, 1998
Plasma etch apparatus with heated scavenging surfaces
APPLIED MATERIALS INC54 citations96
US5583737ADec 10, 1996
Electrostatic chuck usable in high density plasma
APPLIED MATERIALS INC57 citations96
US5477975ADec 26, 1995
Plasma etch apparatus with heated scavenging surfaces
APPLIED MATERIALS INC86 citations96
US5539609AJul 23, 1996
Electrostatic chuck usable in high density plasma
APPLIED MATERIALS INC60 citations95
US6083412AJul 4, 2000
Plasma etch apparatus with heated scavenging surfaces
APPLIED MATERIALS INC13 citations74
US12469680B2Nov 11, 2025
Radio-frequency (RF) matching network for fast impedance tuning
APPLIED MATERIALS INC1 citations63
US12293897B2May 6, 2025
Radio frequency diverter assembly enabling on-demand different spatial
APPLIED MATERIALS INC1 citations63
US12049961B2Jul 30, 2024
Chamber body design architecture for next generation advanced plasma technology
APPLIED MATERIALS INC0 citations62
US11333246B2May 17, 2022
Chamber body design architecture for next generation advanced plasma technology
APPLIED MATERIALS INC0 citations62
US12586761B2Mar 24, 2026
Fast tuning radio frequency (RF) matching network
APPLIED MATERIALS INC0 citations51
US12334304B2Jun 17, 2025
System and methods for implementing a micro pulsing scheme using dual independent pulsers
APPLIED MATERIALS INC0 citations51
US12266506B2Apr 1, 2025
Scanning impedance measurement in a radio frequency plasma processing chamber
APPLIED MATERIALS INC0 citations51
US12456607B2Oct 28, 2025
Auxiliary plasma source for robust ignition and restrikes in a plasma chamber
APPLIED MATERIALS INC0 citations48
LAM RES CORP
14 patentsUS6251770B1Jun 26, 2001
Dual-damascene dielectric structures and methods for making the same
LAM RES CORP106 citations96
US6095741AAug 1, 2000
Dual sided slot valve and method for implementing the same
LAM RES CORP77 citations95
US7010468B2Mar 7, 2006
Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection
LAM RES CORP16 citations92
US6808590B1Oct 26, 2004
Method and apparatus of arrayed sensors for metrological control
LAM RES CORP31 citations92
US6267545B1Jul 31, 2001
Semiconductor processing platform architecture having processing module isolation capabilities
LAM RES CORP28 citations92
US7309618B2Dec 18, 2007
Method and apparatus for real time metal film thickness measurement
LAM RES CORP10 citations84
US7084621B2Aug 1, 2006
Enhancement of eddy current based measurement capabilities
LAM RES CORP10 citations74
US6951624B2Oct 4, 2005
Method and apparatus of arrayed sensors for metrological control
LAM RES CORP5 citations74
US6859765B2Feb 22, 2005
Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection
LAM RES CORP7 citations73
US7060605B2Jun 13, 2006
Methods for making dual-damascene dielectric structures
LAM RES CORP7 citations71
US6909190B2Jun 21, 2005
Dual-damascene dielectric structures
LAM RES CORP5 citations71
US6922053B2Jul 26, 2005
Complementary sensors metrological process and method and apparatus for implementing the same
LAM RES CORP2 citations63
US6894491B2May 17, 2005
Method and apparatus for metrological process control implementing complementary sensors
LAM RES CORP4 citations63
US7501339B2Mar 10, 2009
Methods for making dual-damascene dielectric structures
LAM RES CORP0 citations50