Chamber body design architecture for next generation advanced plasma technology

Abstract

An apparatus for processing a substrate is disclosed and includes, in one embodiment, a twin chamber housing having two openings formed therethrough, a first pump interface member coaxially aligned with one of the two openings formed in the twin chamber housing, and a second pump interface member coaxially aligned with another of the two openings formed in the twin chamber housing, wherein each of the pump interface members include three channels that are concentric with a centerline of the two openings.

What is claimed is: 
     
       1. An apparatus for processing a substrate, comprising:
 a twin chamber housing comprising a body having two transfer openings and two cylindrical openings formed through the body, wherein each of the two transfer openings corresponds to each of the two cylindrical openings; 
 a first pump interface member coaxially aligned with one of the two cylindrical openings formed in the twin chamber housing; 
 a second pump interface member coaxially aligned with another of the two cylindrical openings formed in the twin chamber housing, wherein each of the pump interface members include a first flange at a first end and a second flange at a second end opposing the first end, wherein each of the pump interface members include three channels, each channel extending from the first end to the second end of each corresponding pump interface member, each of the channels being separated by a slot extending from the first end to the second end of each corresponding pump interface member, the three channels arranged concentric with the respective centerline of the two cylindrical openings, wherein a plurality of coupling members for fastening peripheral components are at least partially disposed in the slots, wherein the first pump interface member and the second pump interface member are coupled to an adapter housing having an interior volume, and wherein the adapter housing is coupled to a vacuum pump positioned below the adapter housing; 
 a symmetric valve body positioned between the respective pump interface members and the interior volume of the adapter housing, the symmetric valve body comprising a first valve and a second valve, each of the first valve and second valve being coupled to a dedicated actuator at least partially within the interior volume of the adapter housing. 
 
     
     
       2. The apparatus of  claim 1 , wherein each of the three channels have a volume that is substantially equal. 
     
     
       3. The apparatus of  claim 1 , wherein each of the three channels of the first pump interface member is in selective communication with the vacuum pump. 
     
     
       4. The apparatus of  claim 3 , wherein each of the three channels of the second pump interface member is in selective communication with the vacuum pump. 
     
     
       5. The apparatus of  claim 1 , wherein the interior volume is shared between the three channels of the first pump interface member and the three channels of the second pump interface member. 
     
     
       6. The apparatus of  claim 1 , wherein each of the first and second pump interface members are disposed below and separate from the twin chamber housing. 
     
     
       7. An apparatus for processing a substrate, comprising:
 a twin chamber housing having a body with a fluid channel formed therein, two transfer openings formed in a sidewall of the body, and a hinge feature on opposing sides of the body; 
 a modular pumping interface comprising: 
 a first pump interface member and a second pump interface member, wherein each of the pump interface members include a first end and a second end opposing the first end, wherein each of the pump interface members include three channels extending from the first end to the second end of each corresponding pump interface member, wherein each of the channels are separated by a slot extending from the first end to the second end of each corresponding interface member, and one or more coupling members for fastening peripheral components are at least partially disposed in each slot; 
 at least two separated volumes coupled to the twin chamber housing and providing two separate processing volumes within the twin chamber housing; and 
 an independently operated valve for each processing volume and a dedicated actuator for each valve disposed in an interior volume of a symmetric valve body and an adapter housing coupled between each of the processing volumes and a single vacuum pump, wherein the single vacuum pump is positioned below the adapter housing. 
 
     
     
       8. The apparatus of  claim 7 , wherein the first pump interface member is coaxially aligned with one of two cylindrical openings formed in the twin chamber housing; and
 the second pump interface member is coaxially aligned with another of the two cylindrical openings formed in the twin chamber housing. 
 
     
     
       9. The apparatus of  claim 8 , wherein the three channels are concentric with a centerline of the two cylindrical openings. 
     
     
       10. The apparatus of  claim 9 , wherein each of the three channels of the first pump interface member include a volume that is substantially the same. 
     
     
       11. The apparatus of  claim 9 , wherein each of the three channels of the second pump interface member include a volume that is substantially the same. 
     
     
       12. The apparatus of  claim 9 , wherein the three channels of the first pump interface member and the three channels of the second pump interface member include a volume that is substantially the same. 
     
     
       13. The apparatus of  claim 7 , wherein the modular pumping interface is disposed below and separate from the twin chamber housing. 
     
     
       14. A twin volume substrate processing chamber, comprising:
 a chamber body comprising two transfer openings, a plurality of ports, and a hinge feature, the body having a first cylindrical opening and a second cylindrical opening formed therethrough, and a fluid channel formed in a portion of the body surrounding the first and second cylindrical openings; 
 a first pump interface member coaxially aligned with a centerline of the first cylindrical opening, the first pump interface member having a plurality of first channels formed therein parallel to the centerline; 
 a second pump interface member coaxially aligned with a centerline of the second cylindrical opening and fluidly separated from the first pump interface member, wherein each of the pump interface members include a first end and second end opposing the first end, the second pump interface member having a plurality of second channels formed therein parallel to the centerline, wherein each of the first channels and each of the second channels of each of the first and second interface members extend from the first end to the second end of each corresponding pump interface member, wherein each of the first channels and each of the second channels are separated by a slot extending from the first end to the second end of each corresponding pump interface member, wherein the slot is parallel to the centerlines of the respective cylindrical openings, and one or more coupling members for fastening peripheral components are at least partially disposed in each slot, wherein the first pump interface member and the second pump interface member are coupled to an adapter housing having an interior volume; and wherein the adapter housing is coupled to a vacuum pump positioned below the adapter housing; and 
 a symmetric valve body comprising two valves, each having a valve actuator at least partially disposed in the interior volume of the adapter housing, the symmetric valve body positioned between the respective pump interface members and the interior volume of the adapter housing. 
 
     
     
       15. The twin volume substrate processing chamber of  claim 14 , wherein the interior volume is shared between the plurality of channels of the first pump interface member and the plurality of channels of the second pump interface member. 
     
     
       16. The twin volume substrate processing chamber of  claim 14 , wherein each of the first and second pump interface members are disposed below and separate from the twin chamber housing.