Inventor
HOWARD BRADLEY J
US54 patents
⚠️ This page may combine multiple inventors who share the name “HOWARD BRADLEY J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
44 patentsUS5438011AAug 1, 1995
Method of forming a capacitor using a photoresist contact sidewall having standing wave ripples
MICRON TECHNOLOGY INC114 citations98
US6232219B1May 15, 2001
Self-limiting method of reducing contamination in a contact opening, method of making contacts and semiconductor devices therewith, and resulting structures
MICRON TECHNOLOGY INC49 citations96
US5897372AApr 27, 1999
Formation of a self-aligned integrated circuit structure using silicon-rich nitride as a protective layer
MICRON TECHNOLOGY INC56 citations96
US5750441AMay 12, 1998
Mask having a tapered profile used during the formation of a semiconductor device
MICRON TECHNOLOGY INC37 citations96
US7271089B2Sep 18, 2007
Barrier layer, IC via, and IC line forming methods
MICRON TECHNOLOGY INC15 citations93
US7122480B2Oct 17, 2006
Method of plasma etching a substrate
MICRON TECHNOLOGY INC16 citations93
US6753264B2Jun 22, 2004
Method of controlling striations and CD loss in contact oxide etch
MICRON TECHNOLOGY INC15 citations93
US6716763B2Apr 6, 2004
Method of controlling striations and CD loss in contact oxide etch
MICRON TECHNOLOGY INC20 citations93
US6350706B1Feb 26, 2002
Process for using photo-definable layers in the manufacture of semiconductor devices and resulting structures of same
MICRON TECHNOLOGY INC28 citations93
US6335292B1Jan 1, 2002
Method of controlling striations and CD loss in contact oxide etch
MICRON TECHNOLOGY INC14 citations93
US6056850AMay 2, 2000
Apparatus for improving the performance of a temperature-sensitive etch process
MICRON TECHNOLOGY INC21 citations93
US5966611AOct 12, 1999
Semiconductor processing for forming capacitors by etching polysilicon and coating layer formed over the polysilicon
MICRON TECHNOLOGY INC21 citations93
US5711851AJan 27, 1998
Process for improving the performance of a temperature-sensitive etch process
MICRON TECHNOLOGY INC22 citations93
US7625460B2Dec 1, 2009
Multifrequency plasma reactor
MICRON TECHNOLOGY INC12 citations84
US7538028B2May 26, 2009
Barrier layer, IC via, and IC line forming methods
MICRON TECHNOLOGY INC13 citations84
US6221205B1Apr 24, 2001
Apparatus for improving the performance of a temperature-sensitive etch
MICRON TECHNOLOGY INC14 citations82
US6025271AFeb 15, 2000
Method of removing surface defects or other recesses during the formation of a semiconductor device
MICRON TECHNOLOGY INC14 citations82
US5851916ADec 22, 1998
Formation of a self-aligned integrated circuit structures using planarization to form a top surface
MICRON TECHNOLOGY INC14 citations82
US5686357ANov 11, 1997
Method for forming a contact during the formation of a semiconductor device
MICRON TECHNOLOGY INC17 citations82
US7470625B2Dec 30, 2008
Method of plasma etching a substrate
MICRON TECHNOLOGY INC4 citations74
US6730609B2May 4, 2004
Etch aided by electrically shorting upper and lower sidewall portions during the formation of a semiconductor device
MICRON TECHNOLOGY INC6 citations74
US6524875B2Feb 25, 2003
Method for manufacturing tapered opening using an anisotropic etch during the formation of a semiconductor device
MICRON TECHNOLOGY INC8 citations74
US6492279B1Dec 10, 2002
Plasma etching methods
MICRON TECHNOLOGY INC7 citations74
US6329109B1Dec 11, 2001
Mask having a tapered profile used during the formation of a semiconductor device
MICRON TECHNOLOGY INC12 citations74
US6313022B1Nov 6, 2001
Recessed-container cells and method of forming the same
MICRON TECHNOLOGY INC7 citations74
US6127239AOct 3, 2000
Semiconductor processing methods, and methods of forming capacitors
MICRON TECHNOLOGY INC12 citations74
US6117767ASep 12, 2000
Method of forming an integrated circuit structure
MICRON TECHNOLOGY INC13 citations74
US6100180AAug 8, 2000
Formation of a self-aligned integrated circuit structure using planarization to form a top surface
MICRON TECHNOLOGY INC6 citations74
US6046505AApr 4, 2000
Method for forming a contact during the formation of a semiconductor device
MICRON TECHNOLOGY INC5 citations74
US5970358AOct 19, 1999
Method for forming a capacitor wherein the first capacitor plate includes electrically coupled conductive layers separated by an intervening insulative layer
MICRON TECHNOLOGY INC7 citations74
US5888877AMar 30, 1999
Method of forming recessed container cells
MICRON TECHNOLOGY INC15 citations74
US6103612AAug 15, 2000
Isolated interconnect studs and method for forming the same
MICRON TECHNOLOGY INC7 citations73
US7094699B2Aug 22, 2006
Etch aided by electrically shorting upper and lower sidewall portions during the formation of a semiconductor device
MICRON TECHNOLOGY INC2 citations63
US6583457B1Jun 24, 2003
Recessed container cells and method of forming the same
MICRON TECHNOLOGY INC3 citations63
US6420259B1Jul 16, 2002
Formation of a self-aligned structure
MICRON TECHNOLOGY INC4 citations63
US6413875B1Jul 2, 2002
Process and apparatus for improving the performance of a temperature-sensitive etch process
MICRON TECHNOLOGY INC3 citations63
US6400029B1Jun 4, 2002
Self-limiting method of reducing contamination in a contact opening, method of making contacts and semiconductor devices therewith, and resulting structures
MICRON TECHNOLOGY INC4 citations63
US6355566B1Mar 12, 2002
Method of removing surface defects or other recesses during the formation of a semiconductor device
MICRON TECHNOLOGY INC3 citations63
US6274936B1Aug 14, 2001
Method for forming a contact during the formation of a semiconductor device
MICRON TECHNOLOGY INC2 citations63
US6228772B1May 8, 2001
Method of removing surface defects or other recesses during the formation of a semiconductor device
MICRON TECHNOLOGY INC1 citations63
US6028763AFeb 22, 2000
Capacitor and method for forming a capacitor
MICRON TECHNOLOGY INC4 citations63
US7615164B2Nov 10, 2009
Plasma etching methods and contact opening forming methods
MICRON TECHNOLOGY INC0 citations52
US7573116B2Aug 11, 2009
Etch aided by electrically shorting upper and lower sidewall portions during the formation of a semiconductor device
MICRON TECHNOLOGY INC0 citations52
US7323292B2Jan 29, 2008
Process for using photo-definable layers in the manufacture of semiconductor devices and resulting structures of same
MICRON TECHNOLOGY INC0 citations52
APPLIED MATERIALS INC
3 patentsUS9359679B2Jun 7, 2016
Methods for cyclically etching a metal layer for an interconnection structure for semiconductor applications
APPLIED MATERIALS INC2 citations63
US12049961B2Jul 30, 2024
Chamber body design architecture for next generation advanced plasma technology
APPLIED MATERIALS INC0 citations62
US11333246B2May 17, 2022
Chamber body design architecture for next generation advanced plasma technology
APPLIED MATERIALS INC0 citations62
LAM RES CORP
2 patentsLI LI
1 patentShowing the top 50 of 54 patents by PatentIndex Score.