Inventor · disambiguated record
Leyi Tu
Also filed as: TU LEYI
5 granted patents·3 pending applications·5 citations·filing 2019–2023
65Inventor score
Top patents by PatentIndex Score
8 records- 0193US11545342B2Plasma processor and processing methodADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2020·Granted Jan 3, 2023·4 cites·18 claims
- 0273US2024071724A1Method and device for matching impedance of pulse radio frequency plasmaADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2023·Application pending·0 cites
- 0366US11626314B2Lift pin assembly, an electrostatic chuck and a processing apparatus where the electrostatic chuck is locatedADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2019·Granted Apr 11, 2023·1 cites·10 claims
- 0457US2020185196A1Method and device for matching impedance of pulse radio frequency plasmaADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2019·Application pending·0 cites
- 0550US12087548B2Plasma reactorADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2021·Granted Sep 10, 2024·0 cites·14 claims
- 0650US11682541B2Radio frequency power supply system, plasma processor, and frequency-tuning matchingADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2020·Granted Jun 20, 2023·0 cites·28 claims
- 0744US2021118716A1Electrostatic chuck, method of manufacturing electrostatic chuck, and plasma processing apparatusADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2020·Application pending·0 cites
- 0841US11875970B2Radio frequency electrode assembly for plasma processing apparatus, and plasma processing apparatusADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2019·Granted Jan 16, 2024·0 cites·18 claims
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