Inventor
VAN EIJK JAN
NL35 patents
⚠️ This page may combine multiple inventors who share the name “VAN EIJK JAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
11 patentsUS6717296B2Apr 6, 2004
Lithographic apparatus and motor for use in the apparatus
ASML NETHERLANDS BV23 citations92
US7248339B2Jul 24, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations73
US6943464B2Sep 13, 2005
Lithographic apparatus and motor for use in the apparatus
ASML NETHERLANDS BV10 citations73
US9268211B2Feb 23, 2016
Lithographic apparatus, and patterning device for use in a lithographic process
ASML NETHERLANDS BV2 citations63
US8368868B2Feb 5, 2013
Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless
ASML NETHERLANDS BV2 citations62
USRE40774EJun 23, 2009
Positioning device with a vibration-free object table, and lithographic device provided with such a positioning device
ASML NETHERLANDS BV4 citations61
US7423730B2Sep 9, 2008
Lithographic apparatus
ASML NETHERLANDS BV4 citations60
US7612867B2Nov 3, 2009
Lithographic apparatus
ASML NETHERLANDS BV0 citations48
US10095123B2Oct 9, 2018
Control system, positioning system, lithographic apparatus, control method, device manufacturing method and control program
ASML NETHERLANDS BV0 citations47
US9897926B2Feb 20, 2018
Stage positioning system and lithographic apparatus
ASML NETHERLANDS BV0 citations43
US10061213B2Aug 28, 2018
Sensor, object positioning system, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations36
PHILIPS CORP
9 patentsUS5844666ADec 1, 1998
Positioning device with a vibration-free object table, and lithographic device provided with such a positioning device
PHILIPS CORP52 citations95
US5172160ADec 15, 1992
Optical lithographic device having a machine frame with force compensation
PHILIPS CORP124 citations95
US4778275AOct 18, 1988
Method of aligning a mask and a substrate relative to each other and arrangement for carrying out the method
PHILIPS CORP145 citations94
US5844664ADec 1, 1998
Positioning device with a force actuator system for compensating center-of-gravity displacements, and lithographic device provided with such a positioning device
PHILIPS CORP61 citations93
US5204712AApr 20, 1993
Support device with a tiltable object table, and optical lithographic device provided with such a support device
PHILIPS CORP68 citations92
US5767948AJun 16, 1998
Lithographic device with a three-dimensionally positionable mask holder
PHILIPS CORP37 citations91
US5953105ASep 14, 1999
Positioning device with a reference frame for a measuring system, and a lithographic device provided with such a positioning device
PHILIPS CORP48 citations89
US5243491ASep 7, 1993
Electromagnetic support with current-independent characteristics
PHILIPS CORP53 citations89
US5264982ANov 23, 1993
Electromagnetic support with unilateral control currents
PHILIPS CORP17 citations72
VAN EIJK JAN
4 patentsUS8482719B2Jul 9, 2013
Positioning system, lithographic apparatus and method
VAN EIJK JAN6 citations71
US9019470B2Apr 28, 2015
Lithographic apparatus, and patterning device for use in a lithographic process
VAN EIJK JAN1 citations51
US8982359B2Mar 17, 2015
System for detecting motion, lithographic apparatus and device manufacturing method
VAN EIJK JAN0 citations51
US8441616B2May 14, 2013
Lithographic apparatus and device manufacturing method
VAN EIJK JAN0 citations40
KONINKL PHILIPS ELECTRONICS NV
3 patentsUS7948122B2May 24, 2011
Displacement device
KONINKL PHILIPS ELECTRONICS NV67 citations96
US7375479B2May 20, 2008
Apparatus for processing an object with high position accurancy
KONINKL PHILIPS ELECTRONICS NV11 citations78
US7902494B2Mar 8, 2011
System for detecting motion of a body
KONINKL PHILIPS ELECTRONICS NV10 citations76