Inventor
OGUSHI NOBUAKI
JP17 patents
Patents
17 patentsUS6385497B1May 7, 2002
Remote maintenance system
CANON KK195 citations98
US7062343B2Jun 13, 2006
Remote maintenance system
CANON KK37 citations96
US6963786B2Nov 8, 2005
Remote maintenance system
CANON KK23 citations92
US6897456B2May 24, 2005
Differential pumping system and exposure apparatus
CANON KK37 citations92
US6892109B2May 10, 2005
Remote maintenance system
CANON KK23 citations92
US6867843B2Mar 15, 2005
Debris removing system for use in X-ray light source
CANON KK35 citations92
US6980872B2Dec 27, 2005
Information providing method and system
CANON KK25 citations89
US7805279B2Sep 28, 2010
Remote maintenance system
CANON KK10 citations84
US6957112B2Oct 18, 2005
Industrial machine management system and method
CANON KK12 citations84
US6795161B2Sep 21, 2004
Exposure apparatus, method of manufacturing semiconductor devices and plant therefor
CANON KK11 citations73
US6847696B2Jan 25, 2005
Synchrotron radiation measurement apparatus, X-ray exposure apparatus, and device manufacturing method
CANON KK5 citations72
US6009144ADec 28, 1999
X-ray system and X-ray exposure apparatus
CANON KK6 citations63
US6160865ADec 12, 2000
X-ray exposure apparatus with synchrotron radiation intensity measurement
CANON KK4 citations62
US5760878AJun 2, 1998
Exposure apparatus and alignment discrimination method
CANON KK3 citations62
US5596618AJan 21, 1997
Exposure apparatus and device manufacturing method using the same
CANON KK4 citations62
US6665371B1Dec 16, 2003
Synchrotron radiation measurement apparatus, X-ray exposure apparatus, and device manufacturing method
CANON KK2 citations61
US7225041B2May 29, 2007
Information providing method and system
CANON KK2 citations60