Inventor
HOSHINA MANAO
JP17 patents
Patents
17 patentsUS9269605B2Feb 23, 2016
Substrate gripping apparatus
EBARA CORP4 citations73
US11697184B2Jul 11, 2023
Substrate processing apparatus and substrate processing method
EBARA CORP2 citations72
US10414013B2Sep 17, 2019
Polishing method and polishing apparatus
EBARA CORP2 citations72
US10144103B2Dec 4, 2018
Polishing apparatus and polishing method
EBARA CORP3 citations72
US11400561B2Aug 2, 2022
Top ring for holding a substrate and substrate processing apparatus
EBARA CORP3 citations71
US10525564B2Jan 7, 2020
Reversing machine and substrate polishing apparatus
EBARA CORP3 citations71
US11865665B2Jan 9, 2024
Polishing apparatus
EBARA CORP1 citations62
US12406874B2Sep 2, 2025
Substrate holding apparatus, substrate processing apparatus having substrate holding apparatus, and substrate processing method
EBARA CORP0 citations61
US12002704B2Jun 4, 2024
Substrate holding apparatus, substrate processing apparatus having substrate holding apparatus, and substrate processing method
EBARA CORP0 citations61
US11305399B2Apr 19, 2022
Jig for a polishing apparatus
EBARA CORP0 citations61
US9892953B2Feb 13, 2018
Substrate gripping apparatus
EBARA CORP0 citations52
USD890824SJul 21, 2020
Substrate holding parts
EBARA CORP0 citations51
USD890822SJul 21, 2020
Substrate holding parts
EBARA CORP0 citations51
USD890825SJul 21, 2020
Substrate holding parts
EBARA CORP0 citations51
USD890823SJul 21, 2020
Substrate holding parts
EBARA CORP0 citations51
US11638980B2May 2, 2023
Laminated membrane, substrate holder including laminated membrane, and substrate processing apparatus
EBARA CORP0 citations50
US11331768B2May 17, 2022
Polishing head and polishing apparatus
EBARA CORP0 citations48