Inventor
CHOU HSIN-HUI
TW6 patents
⚠️ This page may combine multiple inventors who share the name “CHOU HSIN-HUI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS11565365B2Jan 31, 2023
System and method for monitoring chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations70
US10872793B2Dec 22, 2020
System and method for monitoring operation conditions of semiconductor manufacturing apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations70
US12521836B2Jan 13, 2026
System and method for monitoring chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11017522B2May 25, 2021
Inspection and cleaning system and method for the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59