Inventor
ITOGA KENJI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “ITOGA KENJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
6 patentsUS8348490B2Jan 8, 2013
Planar light source device and method of manufacturing divided prism mold
MITSUBISHI ELECTRIC CORP4 citations62
US7197108B2Mar 27, 2007
Method of fabricating X-ray mask and method of fabricating semiconductor device using the X-ray mask
MITSUBISHI ELECTRIC CORP3 citations62
US6735275B2May 11, 2004
X-ray exposure method, x-ray exposure apparatus, fine structure and semiconductor device
MITSUBISHI ELECTRIC CORP4 citations59
US6947519B2Sep 20, 2005
X-ray exposure apparatus and method, semiconductor manufacturing apparatus, and microstructure
MITSUBISHI ELECTRIC CORP0 citations51
US6901133B2May 31, 2005
X-ray exposure method and semiconductor device manufactured using this X-ray exposure method as well as X-ray mask, X-ray exposure unit and resist material
MITSUBISHI ELECTRIC CORP0 citations51
US9500795B2Nov 22, 2016
Area light source device and display device using same
MITSUBISHI ELECTRIC CORP0 citations39
CANON KK
3 patentsUS6521889B1Feb 18, 2003
Dust particle inspection apparatus, and device manufacturing method using the same
CANON KK25 citations92
US6947518B2Sep 20, 2005
X-ray exposure apparatus, X-ray exposure method, X-ray mask, X-ray mirror, synchrotron radiation apparatus, synchrotron radiation method and semiconductor device
CANON KK3 citations61
US6770408B2Aug 3, 2004
Dust particle inspection method for X-ray mask
CANON KK0 citations51