Inventor
UZAWA SHUNICHI
JP64 patents
⚠️ This page may combine multiple inventors who share the name “UZAWA SHUNICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
49 patentsUS5231291AJul 27, 1993
Wafer table and exposure apparatus with the same
CANON KK149 citations98
US5577552ANov 26, 1996
Temperature controlling device for mask and wafer holders
CANON KK95 citations96
US5498501AMar 12, 1996
Exposure method
CANON KK59 citations96
US5182615AJan 26, 1993
Exposure apparatus
CANON KK79 citations96
US5142156AAug 25, 1992
Alignment method for printing a pattern of an original onto different surface areas of a substrate
CANON KK63 citations96
US5063582ANov 5, 1991
Liquid cooled x-ray lithographic exposure apparatus
CANON KK91 citations96
US4969168ANov 6, 1990
Wafer supporting apparatus
CANON KK54 citations96
US5524131AJun 4, 1996
Alignment apparatus and SOR x-ray exposure apparatus having same
CANON KK46 citations95
US6018395AJan 25, 2000
Alignment system
CANON KK26 citations93
US5566922AOct 22, 1996
Gate valve device
CANON KK29 citations93
US5323440AJun 21, 1994
X-ray lithography apparatus including a dose detectable mask
CANON KK21 citations93
US5317615AMay 31, 1994
Exposure apparatus
CANON KK22 citations93
US5285488AFeb 8, 1994
Exposure apparatus
CANON KK33 citations93
US5168512ADec 1, 1992
Method of manufacture of semiconductor devices
CANON KK26 citations93
US5159621AOct 27, 1992
X-ray transmitting window and method of mounting the same
CANON KK22 citations93
US5157700AOct 20, 1992
Exposure apparatus for controlling intensity of exposure radiation
CANON KK41 citations93
US5155523AOct 13, 1992
Workpiece supporting mechanism
CANON KK35 citations93
US5150391ASep 22, 1992
Exposure apparatus
CANON KK28 citations93
US5128975AJul 7, 1992
X-ray exposure system
CANON KK28 citations93
US4906326AMar 6, 1990
Mask repair system
CANON KK40 citations93
US4461956AJul 24, 1984
Solid-state photoelectric converter
CANON KK37 citations93
US4390791AJun 28, 1983
Solid-state photoelectric transducer
CANON KK31 citations93
US5822389AOct 13, 1998
Alignment apparatus and SOR X-ray exposure apparatus having same
CANON KK36 citations92
US5610965AMar 11, 1997
Exposure method
CANON KK29 citations92
US5377251ADec 27, 1994
Exposure apparatus
CANON KK26 citations92
US5356686AOct 18, 1994
X-ray mask structure
CANON KK22 citations92
US5172402ADec 15, 1992
Exposure apparatus
CANON KK33 citations92
US5138643AAug 11, 1992
Exposure apparatus
CANON KK42 citations92
US5112133AMay 12, 1992
Alignment system
CANON KK42 citations92
US4796301AJan 3, 1989
Image transmission apparatus
CANON KK24 citations92
US5125014AJun 23, 1992
X-ray exposure apparatus
CANON KK25 citations91
US5160961ANov 3, 1992
Substrate holding device
CANON KK19 citations82
US5131022AJul 14, 1992
Exposure method and apparatus
CANON KK20 citations82
US4532536AJul 30, 1985
Photo-electric transducer
CANON KK22 citations82
US6455203B1Sep 24, 2002
Mask structure and method of manufacturing the same
CANON KK10 citations74
US6324250B1Nov 27, 2001
Exposure method
CANON KK9 citations74
US6272202B1Aug 7, 2001
Exposure method and X-ray mask structure for use with the same
CANON KK14 citations74
US5680428AOct 21, 1997
Process for holding an object
CANON KK9 citations74
US5641264AJun 24, 1997
Substrate conveying device and method of controlling the same
CANON KK9 citations74
US5443932AAug 22, 1995
Exposure method
CANON KK13 citations74
US5390227AFeb 14, 1995
Exposure apparatus
CANON KK12 citations74
US5277539AJan 11, 1994
Substrate conveying apparatus
CANON KK14 citations74
US5226523AJul 13, 1993
Conveying apparatus and method of controlling the same
CANON KK8 citations74
US5172403ADec 15, 1992
X-ray exposure apparatus
CANON KK19 citations74
US5161176ANov 3, 1992
Exposure apparatus
CANON KK8 citations74
US5008703AApr 16, 1991
Exposure apparatus and control of the same
CANON KK18 citations74
US5001734AMar 19, 1991
SOR exposure system
CANON KK10 citations74
US4882776ANov 21, 1989
Image information transmitting system
CANON KK11 citations74
US4634886AJan 6, 1987
Photoelectric imager with a high S/N ratio
CANON KK12 citations74
CANON KABUHIKI KAISHA
1 patentShowing the top 50 of 64 patents by PatentIndex Score.