Inventor · disambiguated record

Marc B. Kubly

Also filed as: KUBLY MARC B

1 granted patent·60 citations·filing 1996–1996

50Inventor score

Technology areasH10P

Files withLAM RES CORP1

Top patents by PatentIndex Score

1 record

0173US5793192AMethods and apparatuses for clamping and declamping a semiconductor wafer in a wafer processing systemLAM RES CORP·Filed 1996·Granted Aug 11, 1998·60 cites·28 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →