Inventor

KANAKASABAPATHY SIVANANDA KRISHNAN

US6 patents

Patents

6 patents

US12278125B2Apr 15, 2025

Integrated dry processes for patterning radiation photoresist patterning

LAM RES CORP8 citations85

US11355353B2Jun 7, 2022

Tin oxide mandrels in patterning

LAM RES CORP15 citations85

US12183604B2Dec 31, 2024

Integrated dry processes for patterning radiation photoresist patterning

LAM RES CORP9 citations84

US12183589B2Dec 31, 2024

Tin oxide mandrels in patterning

LAM RES CORP3 citations74

US11987876B2May 21, 2024

Chamfer-less via integration scheme

LAM RES CORP6 citations73

US12532675B2Jan 20, 2026

Core removal

LAM RES CORP0 citations55