Inventor
DE BOER GUIDO
NL38 patents
⚠️ This page may combine multiple inventors who share the name “DE BOER GUIDO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DE BOER GUIDO
12 patentsUS9395635B2Jul 19, 2016
Position determination in a lithography system using a substrate having a partially reflective position mark
DE BOER GUIDO7 citations83
US8570055B2Oct 29, 2013
Capacitive sensing system
DE BOER GUIDO8 citations82
US9069265B2Jun 30, 2015
Interferometer module
DE BOER GUIDO4 citations80
US9036962B2May 19, 2015
Arrangement of optical fibers, and a method of forming such arrangement
DE BOER GUIDO5 citations79
US8638109B2Jan 28, 2014
Capacitive sensing system with differential pairs
DE BOER GUIDO4 citations79
US8705010B2Apr 22, 2014
Lithography system, method of clamping and wafer table
DE BOER GUIDO2 citations61
US8513959B2Aug 20, 2013
Integrated sensor system
DE BOER GUIDO1 citations60
US9261800B2Feb 16, 2016
Alignment of an interferometer module for use in an exposure tool
DE BOER GUIDO2 citations59
US9201315B2Dec 1, 2015
Lithography system for processing a target, such as a wafer, a method for operating a lithography system for processing a target, such as a wafer and a substrate for use in such a lithography system
DE BOER GUIDO2 citations59
US8895943B2Nov 25, 2014
Lithography system and method of processing substrates in such a lithography system
DE BOER GUIDO0 citations51
US9678443B2Jun 13, 2017
Lithography system with differential interferometer module
DE BOER GUIDO0 citations48
US9395636B2Jul 19, 2016
Lithography system for processing a target, such as a wafer, and a method for operating a lithography system for processing a target, such as a wafer
DE BOER GUIDO0 citations48
MAPPER LITHOGRAPHY IP BV
11 patentsUS7709815B2May 4, 2010
Lithography system and projection method
MAPPER LITHOGRAPHY IP BV19 citations91
US9575418B2Feb 21, 2017
Apparatus for transferring a substrate in a lithography system
MAPPER LITHOGRAPHY IP BV4 citations83
US10054863B2Aug 21, 2018
Method of determining a position of a substrate in a lithography system, substrate for use in such a method, and lithography system for carrying out such method
MAPPER LITHOGRAPHY IP BV3 citations72
US9665013B2May 30, 2017
Lithography system, method of clamping and wafer table
MAPPER LITHOGRAPHY IP BV4 citations72
US9645511B2May 9, 2017
Lithography system, method of clamping and wafer table
MAPPER LITHOGRAPHY IP BV1 citations62
US8841920B2Sep 23, 2014
Capacitive sensing system
MAPPER LITHOGRAPHY IP BV3 citations60
US9457549B2Oct 4, 2016
Method for forming an optical fiber array
MAPPER LITHOGRAPHY IP BV2 citations58
US9507629B2Nov 29, 2016
Network architecture and protocol for cluster of lithography machines
MAPPER LITHOGRAPHY IP BV0 citations51
US9082584B2Jul 14, 2015
Charged particle beam lithography system and target positioning device
MAPPER LITHOGRAPHY IP BV0 citations49
US9690215B2Jun 27, 2017
Interferometer module
MAPPER LITHOGRAPHY IP BV0 citations48
US10144134B2Dec 4, 2018
Enclosure for a target processing machine
MAPPER LITHOGRAPHY IP BV0 citations28
ASML NETHERLANDS BV
3 patentsUSRE48903EJan 25, 2022
Apparatus for transferring a substrate in a lithography system
ASML NETHERLANDS BV0 citations62
USRE49488EApr 11, 2023
Lithography system, method of clamping and wafer table
ASML NETHERLANDS BV0 citations51
USRE48287EOct 27, 2020
Method for forming an optical fiber array
ASML NETHERLANDS BV0 citations48
PEIJSTER JERRY
3 patentsUS8957395B2Feb 17, 2015
Charged particle beam lithography system and target positioning device
PEIJSTER JERRY1 citations58
US8796644B2Aug 5, 2014
Charged particle beam lithography system and target positioning device
PEIJSTER JERRY0 citations47
US8779392B2Jul 15, 2014
Charged particle beam lithography system and target positioning device
PEIJSTER JERRY0 citations47