P

Inventor

DANSBERG MICHEL PIETER

NL11 patents
⚠️ This page may combine multiple inventors who share the name “DANSBERG MICHEL PIETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MAPPER LITHOGRAPHY IP BV

4 patents
US9665013B2May 30, 2017

Lithography system, method of clamping and wafer table

MAPPER LITHOGRAPHY IP BV4 citations72
US9645511B2May 9, 2017

Lithography system, method of clamping and wafer table

MAPPER LITHOGRAPHY IP BV1 citations62
US10144134B2Dec 4, 2018

Enclosure for a target processing machine

MAPPER LITHOGRAPHY IP BV0 citations28
US10087019B2Oct 2, 2018

Load lock system and method for transferring substrates in a lithography system

MAPPER LITHOGRAPHY IP BV0 citations28

ASML NETHERLANDS BV

3 patents
US7359032B2Apr 15, 2008

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV17 citations90
USRE49488EApr 11, 2023

Lithography system, method of clamping and wafer table

ASML NETHERLANDS BV0 citations51
US7679720B2Mar 16, 2010

Apparatus configured to position a workpiece

ASML NETHERLANDS BV0 citations48

DE BOER GUIDO

1 patent
US8705010B2Apr 22, 2014

Lithography system, method of clamping and wafer table

DE BOER GUIDO2 citations61

PEIJSTER JERRY JOHANNES MARTINUS

1 patent
US9268216B2Feb 23, 2016

Projection system with flexible coupling

PEIJSTER JERRY JOHANNES MARTINUS2 citations59

KRUIT PIETER

1 patent
US8325321B2Dec 4, 2012

Lithography system, method of heat dissipation and frame

KRUIT PIETER0 citations51

LOOIJE ALEXIUS OTTO

1 patent
US9009631B2Apr 14, 2015

Lithography system and method for storing positional data of a target

LOOIJE ALEXIUS OTTO0 citations28