Inventor

ARTMANN HANS

DE42 patents

⚠️ This page may combine multiple inventors who share the name “ARTMANN HANS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ARTMANN HANS

BOSCH GMBH ROBERT

Method for production of a thin film and a thin-film solar cell, in particular, on a carrier substrate

Method for production of a semiconductor component and a semiconductor component produced by said method

Micromechanical component with different doping types so that one type is anodized into porous silicon

Electrochemical etching cell

Method for manufacturing breakaway layers for detaching deposited layer systems

Sensor with at least one micromechanical structure and method for production thereof

Method for producing a semiconductor component and a semiconductor component produced according to the method

Method for producing micromechanic sensors and sensors produced by said method

Micromechanical component having a diaphragm

Method for producing a semiconductor component and a semiconductor component, especially a membrane sensor

Method for producing diaphragm sensor unit and diaphragm sensor unit

Method for producing a diaphragm sensor unit and diaphragm sensor unit

Semiconductor component, particularly a micromechanical pressure sensor

Sensor with at least one micromechanical structure, and method for producing it

Micromechanical component and corresponding production method

Structural element having a porous region at least regionally provided with a cover layer and its use as well as method for setting the thermal conductivity of a porous region

Micromechanical component, in particular a sensor element, having a stabilized membrane and a method of producing such a component

Flow sensor

Method for producing a diaphragm sensor array and diaphragm sensor array

Micromechanical component for a capacitive pressure sensor device

MEMS capacitive sensor including improved contact separation

Micromechanical component and method for manufacturing a micromechanical component

Semiconductor component having a first earlier structure differing from a second earlier structure

Pivot apparatus for a micromirror, and illumination apparatus having a pivot apparatus for a micromirror

Sensor element for capacitive differential-pressure sensing

Method for producing a semiconductor component and a semiconductor component produced according to the method

Method for manufacturing a semiconductor component and a semiconductor component, in particular a diaphragm sensor

Method for producing optically transparent regions in a silicon substrate

Production method for a micromechanical component for a sensor device or microphone device

Micromechanical component for a capacitive pressure sensor device

Method for sealing entries in a MEMS element

Method for producing a multilayer MEMS component, and corresponding multilayer MEMS component

Etching device and etching method

Micromechanical component and method for producing a micromechanical component

Comb drive including a pivotable mirror element

Method for manufacturing microelectromechanical structures in a layer sequence and a corresponding electronic component having a microelectromechanical structure

REINMUTH JOCHEN

Layer structure for electrical contacting of semiconductor components

Pressure sensor

PARAGON AG

Micromechanical component

SCHMOLLNGRUBER PETER

Micromechanical component and method for producing a micromechanical component

BENZEL HUBERT

Method for producing a semiconductor component and a semiconductor component produced according to the method

ARTMANN HANS

Method for manufacturing a micromechanical component, and micromechanical component