Inventor
NGUYEN SON T
US44 patents
⚠️ This page may combine multiple inventors who share the name “NGUYEN SON T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
21 patentsUS9349605B1May 24, 2016
Oxide etch selectivity systems and methods
APPLIED MATERIALS INC156 citations99
US9499898B2Nov 22, 2016
Layered thin film heater and method of fabrication
APPLIED MATERIALS INC130 citations98
US7794544B2Sep 14, 2010
Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD system
APPLIED MATERIALS INC49 citations95
US6495233B1Dec 17, 2002
Apparatus for distributing gases in a chemical vapor deposition system
APPLIED MATERIALS INC77 citations93
US7223323B2May 29, 2007
Multi-chemistry plating system
APPLIED MATERIALS INC44 citations92
US6506994B2Jan 14, 2003
Low profile thick film heaters in multi-slot bake chamber
APPLIED MATERIALS INC22 citations92
US7223308B2May 29, 2007
Apparatus to improve wafer temperature uniformity for face-up wet processing
APPLIED MATERIALS INC20 citations91
US6300255B1Oct 9, 2001
Method and apparatus for processing semiconductive wafers
APPLIED MATERIALS INC40 citations91
US7775508B2Aug 17, 2010
Ampoule for liquid draw and vapor draw with a continuous level sensor
APPLIED MATERIALS INC28 citations89
US7311810B2Dec 25, 2007
Two position anneal chamber
APPLIED MATERIALS INC11 citations84
US10424464B2Sep 24, 2019
Oxide etch selectivity systems and methods
APPLIED MATERIALS INC2 citations73
US10424463B2Sep 24, 2019
Oxide etch selectivity systems and methods
APPLIED MATERIALS INC1 citations73
US7311779B2Dec 25, 2007
Heating apparatus to heat wafers using water and plate with turbolators
APPLIED MATERIALS INC9 citations72
US10431435B2Oct 1, 2019
Wafer carrier with independent isolated heater zones
APPLIED MATERIALS INC3 citations69
US6311959B1Nov 6, 2001
Method and apparatus for generating controlled mixture of organic vapor and inert gas
APPLIED MATERIALS INC2 citations63
US6296142B1Oct 2, 2001
Counter balance spring assembly
APPLIED MATERIALS INC4 citations63
US11322337B2May 3, 2022
Plasma processing system workpiece carrier with thermally isolated heater plate blocks
APPLIED MATERIALS INC1 citations62
US11302520B2Apr 12, 2022
Chamber apparatus for chemical etching of dielectric materials
APPLIED MATERIALS INC1 citations61
US12575360B2Mar 10, 2026
Semiconductor processing chamber adapter
APPLIED MATERIALS INC0 citations51
US10633738B2Apr 28, 2020
Chamber component with protective coating suitable for protection against fluorine plasma
APPLIED MATERIALS INC0 citations42
US9303318B2Apr 5, 2016
Multiple complementary gas distribution assemblies
APPLIED MATERIALS INC0 citations40
LIU WEI
3 patentsUS8999106B2Apr 7, 2015
Apparatus and method for controlling edge performance in an inductively coupled plasma chamber
LIU WEI43 citations93
US8137463B2Mar 20, 2012
Dual zone gas injection nozzle
LIU WEI36 citations91
US8062472B2Nov 22, 2011
Method of correcting baseline skew by a novel motorized source coil assembly
LIU WEI3 citations61