USD664172SActiveUtility

Dome assembly for a deposition chamber

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Assignee: ISHIKAWA TETSUYAPriority: Nov 16, 2009Filed: Nov 16, 2009Granted: Jul 24, 2012
Est. expiryNov 16, 2029(~3.3 yrs left)· nominal 20-yr term from priority
Inventors:Tetsuya IshikawaDavid H. QuachAnzhong ChangOlga KrylioukYuriy MelnikHarsukhdeep Singh RatiaSon T. NguyenLily Pang
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PatentIndex Score
1
Cited by
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References
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Claims

Claims

exact text as granted — not AI-modified
The ornamental design for a dome assembly for a deposition chamber, as shown and described.

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