Inventor · disambiguated record
Son T. Nguyen
Also filed as: NGUYEN SON · NGUYEN SON T · NGUYEN SON THACH
46 granted patents·25 pending applications·951 citations·filing 1988–2023
98Inventor score
Top patents by PatentIndex Score
71 records- 0198US9499898B2Layered thin film heater and method of fabricationAPPLIED MATERIALS INC·Filed 2014·Granted Nov 22, 2016·130 cites·11 claims
- 0298US9349605B1Oxide etch selectivity systems and methodsAPPLIED MATERIALS INC·Filed 2015·Granted May 24, 2016·156 cites·16 claims
- 0395US8137463B2Dual zone gas injection nozzleLIU WEI·Filed 2007·Granted Mar 20, 2012·36 cites·8 claims
- 0495US7794544B2Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD systemAPPLIED MATERIALS INC·Filed 2007·Granted Sep 14, 2010·49 cites·14 claims
- 0594US8999106B2Apparatus and method for controlling edge performance in an inductively coupled plasma chamberLIU WEI·Filed 2007·Granted Apr 7, 2015·43 cites·17 claims
- 0694US7775508B2Ampoule for liquid draw and vapor draw with a continuous level sensorAPPLIED MATERIALS INC·Filed 2006·Granted Aug 17, 2010·28 cites·23 claims
- 0793US4857594AMelt adhesive compositionsBAYCHEM INT INC·Filed 1988·Granted Aug 15, 1989·94 cites·18 claims
- 0892US6495233B1Apparatus for distributing gases in a chemical vapor deposition systemAPPLIED MATERIALS INC·Filed 2000·Granted Dec 17, 2002·77 cites·24 claims
- 0991US9312154B2CVD apparatus for improved film thickness non-uniformity and particle performanceTRAN BINH·Filed 2010·Granted Apr 12, 2016·17 cites·20 claims
- 1089US8110644B2Bimodal pipe resin and products made therefromCOFFY TIM·Filed 2010·Granted Feb 7, 2012·9 cites·6 claims
- 1187US7223323B2Multi-chemistry plating systemAPPLIED MATERIALS INC·Filed 2003·Granted May 29, 2007·44 cites·1 claims
- 1286US8183132B2Methods for fabricating group III nitride structures with a cluster toolNIJHAWAN SANDEEP·Filed 2010·Granted May 22, 2012·12 cites·23 claims
- 1384US8491720B2HVPE precursor source hardwareISHIKAWA TETSUYA·Filed 2009·Granted Jul 23, 2013·4 cites·20 claims
- 1484US8481433B2Methods and apparatus for forming nitrogen-containing layersBEVAN MALCOLM J·Filed 2010·Granted Jul 9, 2013·6 cites·21 claims
- 1583US8568529B2HVPE chamber hardwareISHIKAWA TETSUYA·Filed 2009·Granted Oct 29, 2013·4 cites·11 claims
- 1683US7975718B2In-situ monitor of injection valveAPPLIED MATERIALS INC·Filed 2007·Granted Jul 12, 2011·18 cites·4 claims
- 1782US10424464B2Oxide etch selectivity systems and methodsAPPLIED MATERIALS INC·Filed 2017·Granted Sep 24, 2019·2 cites·20 claims
- 1882US9117867B2Electrostatic chuck assemblyHWANG BERNARD L·Filed 2012·Granted Aug 25, 2015·8 cites·20 claims
- 1981US8137468B2Heated valve manifold for ampouleCHOI KENRIC T·Filed 2009·Granted Mar 20, 2012·7 cites·3 claims
- 2081US6214095B1Adsorbent pouch for removal of gaseous contaminantsDONALDSON CO INC·Filed 1999·Granted Apr 10, 2001·64 cites·21 claims
- 2179US10431435B2Wafer carrier with independent isolated heater zonesAPPLIED MATERIALS INC·Filed 2015·Granted Oct 1, 2019·3 cites·19 claims
- 2279US7223308B2Apparatus to improve wafer temperature uniformity for face-up wet processingAPPLIED MATERIALS INC·Filed 2003·Granted May 29, 2007·20 cites·19 claims
- 2378US8004491B2System for and methods of storing and comparing computer generated continuous vector lines through a non-secure or a secure communication channelMAYNARD JEFF·Filed 2007·Granted Aug 23, 2011·16 cites·33 claims
- 2478US6506994B2Low profile thick film heaters in multi-slot bake chamberAPPLIED MATERIALS INC·Filed 2001·Granted Jan 14, 2003·22 cites·36 claims
- 2576US8859703B2Bimodal pipe resin and products made therefromCOFFY TIM·Filed 2011·Granted Oct 14, 2014·2 cites·20 claims
- 2675US8546273B2Methods and apparatus for forming nitrogen-containing layersBEVAN MALCOLM J·Filed 2011·Granted Oct 1, 2013·3 cites·19 claims
- 2774US8062472B2Method of correcting baseline skew by a novel motorized source coil assemblyLIU WEI·Filed 2007·Granted Nov 22, 2011·3 cites·19 claims
- 2873US6300255B1Method and apparatus for processing semiconductive wafersAPPLIED MATERIALS INC·Filed 1999·Granted Oct 9, 2001·40 cites·11 claims
- 2972US11322337B2Plasma processing system workpiece carrier with thermally isolated heater plate blocksAPPLIED MATERIALS INC·Filed 2017·Granted May 3, 2022·1 cites·20 claims
- 3071US10424463B2Oxide etch selectivity systems and methodsAPPLIED MATERIALS INC·Filed 2016·Granted Sep 24, 2019·1 cites·20 claims
- 3168US2023343959A1Novel boron-modified hemp-based carbon and methods of making such for improved electrical devicesNGUYEN SON·Filed 2023·Application pending·0 cites
- 3268US2023116437A1Semiconductor chamber coatings and processesAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 3367US8309874B2Gas heaterHOU TAO·Filed 2008·Granted Nov 13, 2012·2 cites·2 claims
- 3467US7311810B2Two position anneal chamberAPPLIED MATERIALS INC·Filed 2004·Granted Dec 25, 2007·11 cites·25 claims
- 3566US8425977B2Substrate processing chamber with off-center gas delivery funnelMERRY NIR·Filed 2008·Granted Apr 23, 2013·0 cites·18 claims
- 3666US2018171479A1Materials and coatings for a showerhead in a processing systemAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 3764US11302520B2Chamber apparatus for chemical etching of dielectric materialsAPPLIED MATERIALS INC·Filed 2015·Granted Apr 12, 2022·1 cites·9 claims
- 3863US8419855B2Substrate processing chamber with off-center gas delivery funnelMERRY NIR·Filed 2011·Granted Apr 16, 2013·0 cites·20 claims
- 3963US7311779B2Heating apparatus to heat wafers using water and plate with turbolatorsAPPLIED MATERIALS INC·Filed 2003·Granted Dec 25, 2007·9 cites·16 claims
- 4062US2012318457A1Materials and coatings for a showerhead in a processing systemNGUYEN SON·Filed 2012·Application pending·0 cites
- 4160US11557464B2Semiconductor chamber coatings and processesAPPLIED MATERIALS INC·Filed 2020·Granted Jan 17, 2023·0 cites·5 claims
- 4259US2025125181A1Low temperature electrostatic chuckAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 4357US2008051538A1Bimodal pipe resin and products made therefromFINA TECHNOLOGY·Filed 2007·Application pending·0 cites
- 4456US9766022B2Gas heaterHOU TAO·Filed 2012·Granted Sep 19, 2017·0 cites·20 claims
- 4556US2015218700A1Chamber component with protective coating suitable for protection against flourine plasmaAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 4656US2005252449A1Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD systemNGUYEN SON T·Filed 2005·Application pending·0 cites
- 4755US10633738B2Chamber component with protective coating suitable for protection against fluorine plasmaAPPLIED MATERIALS INC·Filed 2017·Granted Apr 28, 2020·0 cites·12 claims
- 4854US9303318B2Multiple complementary gas distribution assembliesAPPLIED MATERIALS INC·Filed 2012·Granted Apr 5, 2016·0 cites·19 claims
- 4952US2012164845A1Dual zone gas injection nozzleLIU WEI·Filed 2012·Application pending·0 cites
- 5051US2023290616A1Semiconductor chamber components with multi-layer coatingAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
Showing the top 50 of 71 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →