Inventor
PRABHU GOPALAKRISHNA B
US27 patents
⚠️ This page may combine multiple inventors who share the name “PRABHU GOPALAKRISHNA B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
22 patentsUS6132298AOct 17, 2000
Carrier head with edge control for chemical mechanical polishing
APPLIED MATERIALS INC118 citations99
US6217426B1Apr 17, 2001
CMP polishing pad
APPLIED MATERIALS INC83 citations97
US7160739B2Jan 9, 2007
Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles
APPLIED MATERIALS INC58 citations96
US6575825B2Jun 10, 2003
CMP polishing pad
APPLIED MATERIALS INC49 citations96
US6361420B1Mar 26, 2002
Method of chemical mechanical polishing with edge control
APPLIED MATERIALS INC55 citations96
US6220942B1Apr 24, 2001
CMP platen with patterned surface
APPLIED MATERIALS INC73 citations95
US6592438B2Jul 15, 2003
CMP platen with patterned surface
APPLIED MATERIALS INC19 citations92
US6439964B1Aug 27, 2002
Method of controlling a polishing machine
APPLIED MATERIALS INC41 citations92
US6361419B1Mar 26, 2002
Carrier head with controllable edge pressure
APPLIED MATERIALS INC41 citations92
US6220941B1Apr 24, 2001
Method of post CMP defect stability improvement
APPLIED MATERIALS INC35 citations92
US7553214B2Jun 30, 2009
Polishing article with integrated window stripe
APPLIED MATERIALS INC23 citations91
US7063597B2Jun 20, 2006
Polishing processes for shallow trench isolation substrates
APPLIED MATERIALS INC30 citations88
US8033895B2Oct 11, 2011
Retaining ring with shaped profile
APPLIED MATERIALS INC7 citations84
US6677239B2Jan 13, 2004
Methods and compositions for chemical mechanical polishing
APPLIED MATERIALS INC16 citations84
US7908743B2Mar 22, 2011
Method for forming an electrical connection
APPLIED MATERIALS INC7 citations82
US7601050B2Oct 13, 2009
Polishing apparatus with grooved subpad
APPLIED MATERIALS INC11 citations82
US7179159B2Feb 20, 2007
Materials for chemical mechanical polishing
APPLIED MATERIALS INC8 citations71
US7841925B2Nov 30, 2010
Polishing article with integrated window stripe
APPLIED MATERIALS INC3 citations61
US7429210B2Sep 30, 2008
Materials for chemical mechanical polishing
APPLIED MATERIALS INC3 citations60
US11768984B2Sep 26, 2023
Parameter sensing and computer modeling for gas delivery health monitoring
APPLIED MATERIALS INC1 citations58
US6558236B2May 6, 2003
Method and apparatus for chemical mechanical polishing
APPLIED MATERIALS INC5 citations54
US12276490B2Apr 15, 2025
System and method to map thickness variations of substrates in manufacturing systems
APPLIED MATERIALS INC0 citations52
SHANMUGASUNDRAM ARULKUMAR P
2 patentsUS8694145B2Apr 8, 2014
Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles
SHANMUGASUNDRAM ARULKUMAR P6 citations82
US8070909B2Dec 6, 2011
Feedback control of chemical mechanical polishing device providing manipulation of removal rate profiles
SHANMUGASUNDRAM ARULKUMAR P13 citations82