Inventor
SUGITA TOMOHIKO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “SUGITA TOMOHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA MEMORY CORP
5 patentsUS11145670B2Oct 12, 2021
Semiconductor storage device and manufacturing method thereof
TOSHIBA MEMORY CORP3 citations71
US10978316B2Apr 13, 2021
Semiconductor processing device
TOSHIBA MEMORY CORP1 citations60
US10290490B2May 14, 2019
Dust collecting apparatus, substrate processing system, and method of manufacturing semiconductor device
TOSHIBA MEMORY CORP0 citations51
US12027380B2Jul 2, 2024
Semiconductor manufacturing apparatus and method of manufacturing semiconductor device
TOSHIBA MEMORY CORP0 citations50
US10199209B2Feb 5, 2019
Substrate treatment apparatus and substrate treatment method
TOSHIBA MEMORY CORP0 citations41
KIOXIA CORP
4 patentsUS11616120B2Mar 28, 2023
Semiconductor substrate, method of manufacturing semiconductor device, and method of manufacturing semiconductor substrate
KIOXIA CORP2 citations69
US12532515B2Jan 20, 2026
Semiconductor substrate, method of manufacturing semiconductor device, and method of manufacturing semiconductor substrate
KIOXIA CORP0 citations59
US12500098B2Dec 16, 2025
Substrate processing device, substrate processing method, and method for manufacturing semiconductor device
KIOXIA CORP0 citations51
US11610789B2Mar 21, 2023
Semiconductor manufacturing apparatus and method of manufacturing semiconductor device
KIOXIA CORP0 citations50