P

Inventor

LIU YU-CHIA

TW27 patents
⚠️ This page may combine multiple inventors who share the name “LIU YU-CHIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

17 patents
US9695039B1Jul 4, 2017

Multi-pressure MEMS package

TAIWAN SEMICONDUCTOR MFG CO LTD17 citations92
US9029961B2May 12, 2015

Wafer level method of sealing different pressure levels for MEMS sensors

TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US9938134B2Apr 10, 2018

Getter electrode to improve vacuum level in a microelectromechanical systems (MEMS) device

TAIWAN SEMICONDUCTOR MFG CO LTD7 citations80
US10689247B2Jun 23, 2020

Method and structure for CMOS-MEMS thin film encapsulation

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US9221674B1Dec 29, 2015

Method for manufacturing a microelectromechanical systems (MEMS) device with different electrical potentials and an etch stop

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US9035451B2May 19, 2015

Wafer level sealing methods with different vacuum levels for MEMS sensors

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US9403673B2Aug 2, 2016

Method for manufacturing a microelectromechanical systems (MEMS) device with different electrical potentials and an etch stop

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations63
US12134555B2Nov 5, 2024

Method and structure for CMOS-MEMS thin film encapsulation

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11667517B2Jun 6, 2023

Method and structure for CMOS-MEMS thin film encapsulation

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11312623B2Apr 26, 2022

Semiconductor structure for MEMS device

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10752497B2Aug 25, 2020

Semiconductor structure for MEMS device

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10494252B2Dec 3, 2019

MEMS devices and methods of manufacturing the same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10273144B2Apr 30, 2019

Multi-pressure MEMS package

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10160639B2Dec 25, 2018

Semiconductor structure for MEMS Device

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9868628B2Jan 16, 2018

Method and structure for CMOS-MEMS thin film encapsulation

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10273148B2Apr 30, 2019

Micro-electro-mechanical system and manufacturing method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41
US10202278B2Feb 12, 2019

Semiconductor structure with cavity spacing monitoring functions

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41

TAIWAN SEMICONDUCTOR MFG

2 patents

LIN YU-TONG

2 patents

PHISON ELECTRONICS CORP

1 patent

NAT UNIV CHUNG CHENG

1 patent

PIXART IMAGING INC

1 patent

TSAI MING HAN

1 patent

KAIJET TECHNOLOGY INTERNAT LTD

1 patent

LIU YU CHIA

1 patent