Inventor
CHIKAKI SHINICHI
JP14 patents
⚠️ This page may combine multiple inventors who share the name “CHIKAKI SHINICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEC CORP
5 patentsUS5844304ADec 1, 1998
Process for manufacturing semiconductor device and semiconductor wafer
NEC CORP120 citations98
US5542874AAug 6, 1996
Wafer polishing apparatus
NEC CORP67 citations95
US5649855AJul 22, 1997
Wafer polishing device
NEC CORP18 citations83
US4907039AMar 6, 1990
Semiconductor device
NEC CORP17 citations73
US5483717AJan 16, 1996
Cleaning system using acrylic emulsion for semiconductor wafers
NEC CORP6 citations62
CHIKAKI SHINICHI
3 patentsUS8592990B2Nov 26, 2013
Semiconductor device and method of manufacturing semiconductor device
CHIKAKI SHINICHI6 citations70
US8981563B2Mar 17, 2015
Semiconductor device and method of manufacturing the same
CHIKAKI SHINICHI0 citations49
US8273410B2Sep 25, 2012
Process for manufacturing hydrophobized microporous film
CHIKAKI SHINICHI0 citations39