Inventor
SHIMODA ATSUSHI
JP28 patents
⚠️ This page may combine multiple inventors who share the name “SHIMODA ATSUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
17 patentsUS6476388B1Nov 5, 2002
Scanning electron microscope having magnification switching control
HITACHI LTD95 citations97
US6456951B1Sep 24, 2002
Method and apparatus for processing inspection data
HITACHI LTD58 citations96
US6927847B2Aug 9, 2005
Method and apparatus for inspecting pattern defects
HITACHI LTD24 citations93
US7081953B2Jul 25, 2006
Apparatus and method for inspecting pattern
HITACHI LTD11 citations92
US6831737B2Dec 14, 2004
Apparatus and method for inspecting pattern
HITACHI LTD14 citations92
US6334097B1Dec 25, 2001
Method of determining lethality of defects in circuit pattern inspection method of selecting defects to be reviewed and inspection system of circuit patterns involved with the methods
HITACHI LTD29 citations92
US7062081B2Jun 13, 2006
Method and system for analyzing circuit pattern defects
HITACHI LTD31 citations91
US7127098B2Oct 24, 2006
Image detection method and its apparatus and defect detection method and its apparatus
HITACHI LTD36 citations90
US6756589B1Jun 29, 2004
Method for observing specimen and device therefor
HITACHI LTD29 citations90
US6721047B2Apr 13, 2004
Method and apparatus for inspecting defects of a specimen
HITACHI LTD18 citations84
US7110105B2Sep 19, 2006
Method and apparatus for inspecting pattern defects
HITACHI LTD10 citations74
US6556955B2Apr 29, 2003
Method of determining lethality of defects in circuit pattern inspection, method of selecting defects to be reviewed, and inspection system of circuit patterns involved with the methods
HITACHI LTD7 citations74
US7903249B2Mar 8, 2011
Method and apparatus for inspecting pattern defects
HITACHI LTD3 citations63
US7911601B2Mar 22, 2011
Apparatus and method for inspecting pattern
HITACHI LTD3 citations62
US7352890B2Apr 1, 2008
Method for analyzing circuit pattern defects and a system thereof
HITACHI LTD3 citations61
US7489395B2Feb 10, 2009
Method and apparatus for inspecting pattern defects
HITACHI LTD0 citations52
US7446866B2Nov 4, 2008
Apparatus and method for inspecting pattern
HITACHI LTD0 citations51