Method of determining lethality of defects in circuit pattern inspection, method of selecting defects to be reviewed, and inspection system of circuit patterns involved with the methods

Abstract

A method of reviewing defects on a substrate. The method includes inputting information of defects on a substrate detected by a detection apparatus, identifying cluster of defects detected on the substrate by using the inputted information, selecting defects to be reviewed from the cluster identified, reviewing the selected defects, and classifying the reviewed defects.

What is claimed is:  
     
       1. A method of reviewing defects, comprising the steps of: 
       inputting information of defects on a substrate including coordinate data and size of the defects detected by a detection apparatus;  
       identifying cluster of defects detected on the substrate by using the inputted information;  
       selecting defects to be reviewed from the cluster identified;  
       reviewing the selected defects; and  
       classifying the reviewed defects.  
     
     
       2. A method of reviewing defects according to  claim 1 , wherein the cluster of defects is identified by the density on the substrate. 
     
     
       3. A method of reviewing defects according to  claim 1 , wherein the defects to be reviewed are lethal defects. 
     
     
       4. A method of reviewing defects according to  claim 1 , wherein the defects are reviewed by SEM. 
     
     
       5. A method of reviewing defects according to  claim 1 , wherein the steps of inputting information, identifying cluster of defects, selecting defects, reviewing the selected defects, and classifying the reviewed defects are effected during processing of the substrate prior to completion of processing of the substrate so as to form at least one semiconductor chip from the processed substrate. 
     
     
       6. A method of reviewing defects, comprising the steps of: 
       inputting coordinate data and size data of defects on a substrate on which a circuit pattern is formed and detected by a detection apparatus;  
       determining lethality of defects detected on the substrate by using the inputted information;  
       selecting defects to be reviewed from lethal defects whose lethality is determined in the step of determining;  
       reviewing the selected defects; and  
       classifying the reviewed defects.  
     
     
       7. A method of reviewing defects according to  claim 6 , wherein the lethality of defects differs by location on the substrate. 
     
     
       8. A method of reviewing defects according to  claim 6 , wherein the lethality of defects is determined by using design data of the circuit pattern. 
     
     
       9. A method of reviewing defects according to  claim 6 , wherein the steps of inputting coordinate data and size data of defects, determining lethality of defects, selecting defects, reviewing the selected defects, and classifying the reviewed defects, are effected during processing of the substrate prior to completion of processing of the substrate so as to form at least one semiconductor chip from the processed substrate. 
     
     
       10. A method of reviewing defects, comprising the steps of: 
       inputting coordinate data and size data of defects a substrate processed in a processing step and detected by a detection apparatus;  
       selecting defects to be reviewed from lethal defects whose lethality is determined by using the inputted coordinate data and size data of defects by using an analysis system; and  
       reviewing the selected defects and classifying the selected defects by a reviewing apparatus.  
     
     
       11. A method of reviewing defects according to  claim 10 , wherein the lethality of defects differs by location on the substrate. 
     
     
       12. A method of reviewing defects according to  claim 10 , wherein the defects selected to be reviewed are the defects occurring in the processing step. 
     
     
       13. A method of reviewing defects according to  claim 10 , wherein the reviewing apparatus is a SEM. 
     
     
       14. A method of reviewing defects according to  claim 10  wherein the steps of inputting coordinate data and size data of defects, selecting defects, and reviewing the selected defects, and classifying the selected defects, are effected during processing of the substrate prior to completion of processing of the substrate so as to form at least one semiconductor chip from the processed substrate.