Inventor · disambiguated record
Atsushi Shimoda
Also filed as: SHIMODA ATSUSHI
28 granted patents·8 pending applications·529 citations·filing 1993–2020
97Inventor score
Files withHITACHI LTD18HITACHI HIGH TECH CORP4LSI LOGIC CORP2SANDISK TECHNOLOGIES INC2SHIMODA ATSUSHI2
Top patents by PatentIndex Score
36 records- 0196US11398497B2Three-dimensional memory device containing auxiliary support pillar structures and method of making the sameSANDISK TECHNOLOGIES LLC·Filed 2020·Granted Jul 26, 2022·5 cites·20 claims
- 0293US6900888B2Method and apparatus for inspecting a pattern formed on a substrateHITACHI HIGH TECH CORP·Filed 2003·Granted May 31, 2005·38 cites·23 claims
- 0391US6456951B1Method and apparatus for processing inspection dataHITACHI LTD·Filed 2000·Granted Sep 24, 2002·58 cites·27 claims
- 0490US9484314B2Word line hook up with protected air gapSANDISK TECHNOLOGIES INC·Filed 2015·Granted Nov 1, 2016·7 cites·6 claims
- 0589US7110105B2Method and apparatus for inspecting pattern defectsHITACHI LTD·Filed 2005·Granted Sep 19, 2006·10 cites·7 claims
- 0689US6476388B1Scanning electron microscope having magnification switching controlHITACHI LTD·Filed 1999·Granted Nov 5, 2002·95 cites·9 claims
- 0788US6927847B2Method and apparatus for inspecting pattern defectsHITACHI LTD·Filed 2002·Granted Aug 9, 2005·24 cites·28 claims
- 0886US5278103AMethod for the controlled formation of voids in doped glass dielectric filmsLSI LOGIC CORP·Filed 1993·Granted Jan 11, 1994·82 cites·18 claims
- 0984US7062081B2Method and system for analyzing circuit pattern defectsHITACHI LTD·Filed 2001·Granted Jun 13, 2006·31 cites·11 claims
- 1082US7127098B2Image detection method and its apparatus and defect detection method and its apparatusHITACHI LTD·Filed 2002·Granted Oct 24, 2006·36 cites·28 claims
- 1182US6831737B2Apparatus and method for inspecting patternHITACHI LTD·Filed 2002·Granted Dec 14, 2004·14 cites·24 claims
- 1281US6721047B2Method and apparatus for inspecting defects of a specimenHITACHI LTD·Filed 2001·Granted Apr 13, 2004·18 cites·17 claims
- 1380US7081953B2Apparatus and method for inspecting patternHITACHI LTD·Filed 2004·Granted Jul 25, 2006·11 cites·10 claims
- 1478US7911601B2Apparatus and method for inspecting patternHITACHI LTD·Filed 2008·Granted Mar 22, 2011·3 cites·8 claims
- 1578US7646477B2Method and apparatus for inspecting a pattern formed on a substrateHITACHI HIGH TECH CORP·Filed 2005·Granted Jan 12, 2010·4 cites·12 claims
- 1677US7903249B2Method and apparatus for inspecting pattern defectsHITACHI LTD·Filed 2009·Granted Mar 8, 2011·3 cites·18 claims
- 1774US8253934B2Method and apparatus for inspecting a pattern formed on a substrateYOSHIDA MINORU·Filed 2009·Granted Aug 28, 2012·2 cites·16 claims
- 1874US8149395B2Apparatus and method for inspecting patternUTO SACHIO·Filed 2011·Granted Apr 3, 2012·1 cites·13 claims
- 1970US9595444B2Floating gate separation in NAND flash memorySANDISK TECHNOLOGIES INC·Filed 2015·Granted Mar 14, 2017·2 cites·10 claims
- 2070US7352890B2Method for analyzing circuit pattern defects and a system thereofHITACHI LTD·Filed 2006·Granted Apr 1, 2008·3 cites·7 claims
- 2169US6334097B1Method of determining lethality of defects in circuit pattern inspection method of selecting defects to be reviewed and inspection system of circuit patterns involved with the methodsHITACHI LTD·Filed 1999·Granted Dec 25, 2001·29 cites·38 claims
- 2264US6556955B2Method of determining lethality of defects in circuit pattern inspection, method of selecting defects to be reviewed, and inspection system of circuit patterns involved with the methodsHITACHI LTD·Filed 2001·Granted Apr 29, 2003·7 cites·14 claims
- 2362US6756589B1Method for observing specimen and device thereforHITACHI LTD·Filed 1999·Granted Jun 29, 2004·29 cites·10 claims
- 2460US9011065B2Vacuum processing apparatus and operating method of vacuum processing apparatusTAUCHI SUSUMU·Filed 2010·Granted Apr 21, 2015·1 cites·7 claims
- 2559US8451439B2Apparatus and method for inspecting patternUTO SACHIO·Filed 2012·Granted May 28, 2013·0 cites·13 claims
- 2657US7489395B2Method and apparatus for inspecting pattern defectsHITACHI LTD·Filed 2006·Granted Feb 10, 2009·0 cites·22 claims
- 2757US7446866B2Apparatus and method for inspecting patternHITACHI LTD·Filed 2006·Granted Nov 4, 2008·0 cites·9 claims
- 2853US5719084AMethod for the controlled formation of voids in doped glass dielectric filmsLSI LOGIC CORP·Filed 1995·Granted Feb 17, 1998·16 cites·42 claims
- 2952US2014297552A1Logistics designing device, method and programHITACHI LTD·Filed 2012·Application pending·0 cites
- 3050US2014172494A1Multi-base inventory deployment computation deviceHOSODA JUNKO·Filed 2012·Application pending·0 cites
- 3147US2006085278A1Renewal proposal support systemSHIMODA ATSUSHI·Filed 2005·Application pending·0 cites
- 3243US2007299640A1Design Support Device, Program and Design Support MethodSHIMODA ATSUSHI·Filed 2007·Application pending·0 cites
- 3343US2015194327A1Vacuum processing system and vacuum processing method of semiconductor processing substrateHITACHI HIGH TECH CORP·Filed 2015·Application pending·0 cites
- 3442US2015021790A1Semiconductor deviceSAN DISK CORP·Filed 2014·Application pending·0 cites
- 3535US2011110752A1Vacuum processing system and vacuum processing method of semiconductor processing substrateHITACHI HIGH TECH CORP·Filed 2010·Application pending·0 cites
- 3632US2015179563A1Semiconductor deviceTOSHIBA KK·Filed 2015·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Atsushi Shimoda files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →