Inventor
KAKIMOTO AKINOBU
JP33 patents
⚠️ This page may combine multiple inventors who share the name “KAKIMOTO AKINOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
24 patentsUS8946065B2Feb 3, 2015
Method of forming seed layer and method of forming silicon-containing thin film
TOKYO ELECTRON LTD9 citations84
US9797067B2Oct 24, 2017
Selective epitaxial growth method and film forming apparatus
TOKYO ELECTRON LTD2 citations73
US9758865B2Sep 12, 2017
Silicon film forming method, thin film forming method and cross-sectional shape control method
TOKYO ELECTRON LTD4 citations73
US9263250B2Feb 16, 2016
Method and apparatus of forming silicon nitride film
TOKYO ELECTRON LTD3 citations73
US8895414B1Nov 25, 2014
Method and apparatus for forming amorphous silicon film
TOKYO ELECTRON LTD4 citations73
US11786946B2Oct 17, 2023
Cleaning method and film forming apparatus
TOKYO ELECTRON LTD4 citations72
US10460950B2Oct 29, 2019
Substrate processing system and substrate processing method
TOKYO ELECTRON LTD2 citations72
US7615251B2Nov 10, 2009
Processing device using shower head structure and processing method
TOKYO ELECTRON LTD3 citations62
US6407010B1Jun 18, 2002
Single-substrate-heat-processing apparatus and method for semiconductor process
TOKYO ELECTRON LTD4 citations62
US12482663B2Nov 25, 2025
Processing apparatus
TOKYO ELECTRON LTD0 citations61
US9920422B2Mar 20, 2018
Method and apparatus of forming silicon nitride film
TOKYO ELECTRON LTD0 citations52
US9777366B2Oct 3, 2017
Thin film forming method
TOKYO ELECTRON LTD1 citations52
US9490122B2Nov 8, 2016
Method and apparatus of forming carbon-containing silicon film
TOKYO ELECTRON LTD0 citations52
US9425073B2Aug 23, 2016
Depression filling method and processing apparatus
TOKYO ELECTRON LTD1 citations52
US9190271B2Nov 17, 2015
Thin film formation method
TOKYO ELECTRON LTD0 citations52
US9145604B2Sep 29, 2015
Thin film forming method and film forming apparatus
TOKYO ELECTRON LTD1 citations52
US9123782B2Sep 1, 2015
Amorphous silicon film formation method and amorphous silicon film formation apparatus
TOKYO ELECTRON LTD0 citations52
US8815714B2Aug 26, 2014
Method of forming a germanium thin film
TOKYO ELECTRON LTD0 citations52
US8361550B2Jan 29, 2013
Method for forming SrTiO3 film and storage medium
TOKYO ELECTRON LTD1 citations52
US12538504B2Jan 27, 2026
Film formation method
TOKYO ELECTRON LTD0 citations46
US9353442B2May 31, 2016
Apparatus for forming silicon-containing thin film
TOKYO ELECTRON LTD0 citations42
US9318328B2Apr 19, 2016
Method and apparatus for forming silicon film
TOKYO ELECTRON LTD0 citations41
US7816282B2Oct 19, 2010
Method for forming SrTiO3 film
TOKYO ELECTRON LTD0 citations41
US9646879B2May 9, 2017
Depression filling method and processing apparatus
TOKYO ELECTRON LTD0 citations39
KAKIMOTO AKINOBU
5 patentsUS8945339B2Feb 3, 2015
Film formation apparatus
KAKIMOTO AKINOBU488 citations98
US8802547B2Aug 12, 2014
Method and apparatus for forming amorphous silicon film
KAKIMOTO AKINOBU13 citations83
US9005459B2Apr 14, 2015
Film deposition method and film deposition apparatus
KAKIMOTO AKINOBU3 citations61
US8586448B2Nov 19, 2013
Method and apparatus for forming silicon film
KAKIMOTO AKINOBU0 citations51
US8518834B2Aug 27, 2013
Method and apparatus for forming oxide film on carbon film
KAKIMOTO AKINOBU0 citations51