P

Inventor

PANG LILY

US7 patents
⚠️ This page may combine multiple inventors who share the name “PANG LILY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ISHIKAWA TETSUYA

3 patents
US8568529B2Oct 29, 2013

HVPE chamber hardware

ISHIKAWA TETSUYA4 citations62
US8491720B2Jul 23, 2013

HVPE precursor source hardware

ISHIKAWA TETSUYA4 citations62
USD664172SJul 24, 2012

Dome assembly for a deposition chamber

ISHIKAWA TETSUYA1 citations51

APPLIED MATERIALS INC

2 patents
US6143078ANov 7, 2000

Gas distribution system for a CVD processing chamber

APPLIED MATERIALS INC147 citations98
US6486081B1Nov 26, 2002

Gas distribution system for a CVD processing chamber

APPLIED MATERIALS INC124 citations97

SOKUDO CO LTD

1 patent
US7497026B2Mar 3, 2009

Method and system for detection of wafer centering in a track lithography tool

SOKUDO CO LTD14 citations82

NIJHAWAN SANDEEP

1 patent
US8183132B2May 22, 2012

Methods for fabricating group III nitride structures with a cluster tool

NIJHAWAN SANDEEP12 citations79