Inventor
PAULS WALTER
DE10 patents
⚠️ This page may combine multiple inventors who share the name “PAULS WALTER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
9 patentsUS9939730B2Apr 10, 2018
Optical assembly
ZEISS CARL SMT GMBH7 citations82
US10001631B2Jun 19, 2018
Projection lens for EUV microlithography, film element and method for producing a projection lens comprising a film element
ZEISS CARL SMT GMBH6 citations70
US11415892B2Aug 16, 2022
Method for producing a reflecting optical element of a projection exposure apparatus and reflecting optical element for a projection exposure apparatus, projection lens and projection exposure apparatus
ZEISS CARL SMT GMBH2 citations63
US9709770B2Jul 18, 2017
Mirror arrangement for an EUV projection exposure apparatus, method for operating the same, and EUV projection exposure apparatus
ZEISS CARL SMT GMBH0 citations50
US12174546B2Dec 24, 2024
Method for measuring an effect of a wavelength-dependent measuring light reflectivity and an effect of a polarization of measuring light on a measuring light impingement on a lithography mask
ZEISS CARL SMT GMBH0 citations49
US9470872B2Oct 18, 2016
Reflective optical element
ZEISS CARL SMT GMBH1 citations48
US12422743B2Sep 23, 2025
Method for measuring a reflectivity of an object for measurement light and metrology system for carrying out the method
ZEISS CARL SMT GMBH0 citations47
US10859819B2Dec 8, 2020
Method for changing a surface via particle irradiation
ZEISS CARL SMT GMBH0 citations39
US10551747B2Feb 4, 2020
Device for changing a surface shape of an optical element via electron irradiation
ZEISS CARL SMT GMBH0 citations37