Inventor
IM SE-HYUK
US10 patents
⚠️ This page may combine multiple inventors who share the name “IM SE-HYUK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
7 patentsUS11728203B2Aug 15, 2023
Chuck assembly, planarization process, apparatus and method of manufacturing an article
CANON KK2 citations72
US11145535B2Oct 12, 2021
Planarization process, apparatus and method of manufacturing an article
CANON KK3 citations72
US11562924B2Jan 24, 2023
Planarization apparatus, planarization process, and method of manufacturing an article
CANON KK2 citations70
US12165903B2Dec 10, 2024
Chuck assembly, planarization process, apparatus and method of manufacturing an article
CANON KK0 citations61
US12283522B2Apr 22, 2025
Planarization apparatus, planarization process, and method of manufacturing an article
CANON KK0 citations60
US11249405B2Feb 15, 2022
System and method for improving the performance of a nanoimprint system
CANON KK0 citations51
US12153342B2Nov 26, 2024
Nanofabrication method with correction of distortion within an imprint system
CANON KK0 citations50