Inventor

YAGI TAKAYUKI

JP148 patents

⚠️ This page may combine multiple inventors who share the name “YAGI TAKAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YAGI TAKAYUKI

CANON KK

Optical probe for detecting or irradiating light and near-field optical microscope having such probe and manufacturing method of such probe

Method of producing a through-hole, silicon substrate having a through-hole, device using such a substrate, method of producing an ink-jet print head, and ink-jet print head

Microstructure and method of forming the same

Microstructure, process for manufacturing thereof and devices incorporating the same

Sample measuring device and sample measuring system

Method of manufacturing micro-tip for detecting tunneling current or micro-force or magnetic force

Cantilever type probe, scanning tunneling microscope and information processing device equipped with said probe

Optical deflector and method of producing same

Electron optical system array, method of fabricating the same, charged-particle beam exposure apparatus, and device manufacturing method

Tiltable-body apparatus, and method of fabricating the same

Methods of fabricating a microstructure array

Microstructure array, and apparatus and method for forming the microstructure array, and a mold for fabricating a microstructure array

Probe having micro-projection and manufacturing method thereof

Optical probe having a refractive index micro-lens and method of manufacturing the same

Methods for making spinnable ball, display medium and display device

Microprobe chip for detecting evanescent waves probe provided with the microprobe chip and evanescent wave detector, nearfield scanning optical microscope, and information regenerator provided with the microprobe chip

Process for manufacturing microstructure

Process for producing a probe-driving mechanism

Electrostatic actuator, probe using the actuator, scanning probe microscope, processing apparatus, and recording/reproducing apparatus

Cantilever probe and apparatus using the same

Apparatus including at least one probe for being displaced relative to a recording medium for recording and/or reproducing information

Apparatus for preparing a semiconductor device, photo treatment apparatus, pattern forming apparatus and fabrication apparatus

Method of manufacturing cantilever drive mechanism, method of manufacturing probe drive mechanism, cantilever drive mechanism, probe drive mechanism and electronic device which uses the same

Cantilever type displacement element, and scanning tunneling microscope or information processing apparatus using same

Probe drive mechanism and electronic device which uses the same

Cantilever type probe, and scanning tunnel microscope and information processing apparatus employing the same

Cantilever unit and atomic force microscope, magnetic force microscope, reproducing apparatus and information processing apparatus using the cantilever unit

Angular acceleration sensor

Tiltable-body apparatus, and method of fabricating the same

Tiltable-body apparatus, and method of fabricating the same

Tiltable-body apparatus, and method of fabricating the same

Light deflector, method of manufacturing light deflector and torsion oscillating member

Optical deflector and method of producing same

Light deflector, method of manufacturing light deflector, optical device using light deflector, and torsion oscillating member

Electron optical system, charged-particle beam exposure apparatus using the same, and device manufacturing method

Rocking member apparatus

Optical waveguide, method of fabricating the waveguide, and optical interconnection device using the waveguide

Movable-body apparatus, optical deflector, and method of fabricating the same

Mold for forming a microlens and method of fabricating the same

Aspherical microstructure, and method of fabricating the same

Charged-particle beam exposure apparatus and device manufacturing method

Semispherical microstructure, microlens and method of fabricating the same

Liquid discharge head, recording apparatus, and method for manufacturing liquid discharge heads

Method for manufacturing ink jet recording heads

Light deflection device and array thereof

Light deflection device and array thereof

Torsion type probe and scanning probe microscope using the same

Colored ball display system

Information processing apparatus having face regulating system

ASAHI INTECC CO LTD

Catheter