Inventor
WRIGHT TERRANCE M
US6 patents
Patents
6 patentsUS6110832AAug 29, 2000
Method and apparatus for slurry polishing
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US5913713AJun 22, 1999
CMP polishing pad backside modifications for advantageous polishing results
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US5034348AJul 23, 1991
Process for forming refractory metal silicide layers of different thicknesses in an integrated circuit
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US4786360ANov 22, 1988
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US4919750AApr 24, 1990
Etching metal films with complexing chloride plasma
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US5877589AMar 2, 1999
Gas discharge devices including matrix materials with ionizable gas filled sealed cavities
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